Multimode excitations for complex multifunctional logic device

Sherif Adekunle Tella, Mohammad I. Younis

Research output: Contribution to journalArticlepeer-review

6 Scopus citations


The simplicity and prospect of energy efficiency of microelectromechanical systems (MEMS) resonator-based computing devices have captivated considerable research interest in recent years. Hence, they are being explored for ultra-low power computing machines, which are currently needed for internet-of-things (IoT) applications. Recently, there have been successful demonstrations of fundamental logic gates. However, the realization of complex multifunctional logic devices that involve multi-input and multi-output lines are facing challenges, such as the interconnections between multiple resonators and the limited controllability of the operating frequency. In this study, we demonstrate a 1:2 Demux combinational logic device with improved energy efficiency using the multi vibration modes of a single MEMS resonator. The MEMS device consists of three connected in-plane microbeams in the form of a U-shape structure. The actuation and modulation are based on electrostatic forces. The device shows actuation energy of 0.082 fJ and 0.91 fJ for output 1 and output 2, respectively, and switching energy per logic operation of 11.01 pJ for output 1 and 5.31 pJ for output 2. This indicates 75% decrease in switching energy per logic operation in comparison with the previously reported values for electrostatically actuated MEMS resonator-based computing devices.
Original languageEnglish (US)
Pages (from-to)125017
JournalJournal of Micromechanics and Microengineering
Issue number12
StatePublished - Nov 4 2019

Bibliographical note

KAUST Repository Item: Exported on 2020-10-01
Acknowledged KAUST grant number(s): OSR-2016-CRG5-3001
Acknowledgements: This publication is based upon work supported by the King Abdullah University of Science and Technology (KAUST) office of sponsored research OSR under Award No. OSR-2016-CRG5-3001.


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