Multi-axis micromirror for optical coherence tomography

Umer Izhar; Boon S. Ooi; Svetlana Tatic-Lucic

doi:10.1016/j.proche.2009.07.286

Multi-axis micromirror for optical coherence tomography

Umer Izhar, Boon S. Ooi, Svetlana Tatic-Lucic^*

^*Corresponding author for this work

Electrical and Computer Engineering

Research output: Contribution to journal › Conference article › peer-review

1 Scopus citations

Abstract

In this paper we describe for the first time the design, fabrication and initial characterization results of a novel gimbal-less, thermally actuated micromirror developed for optical coherence tomography (OCT) application. We report large deflection angle of up to 30° that has been achieved at low input power of less than 17mW and voltage of less than 1V. Moreover, this device has a potential of integration with GaAs/Si substrate due to moderate temperatures developed during its operation-less than 100°C increase with respect to ambient at angular deflection of 30°.

Original language	English (US)
Pages (from-to)	1147-1150
Number of pages	4
Journal	Procedia Chemistry
Volume	1
Issue number	1
DOIs	https://doi.org/10.1016/j.proche.2009.07.286
State	Published - Sep 2009
Event	Eurosensors 23rd Conference - Lausanne, Switzerland Duration: Sep 6 2009 → Sep 9 2009

Keywords

Angular Deflection
Electrothermal Actuator
Micromirror
Multi-axis mirror
OCT imaging
Optical Scanner

ASJC Scopus subject areas

General Chemistry
General Chemical Engineering

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10.1016/j.proche.2009.07.286

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title = "Multi-axis micromirror for optical coherence tomography",

abstract = "In this paper we describe for the first time the design, fabrication and initial characterization results of a novel gimbal-less, thermally actuated micromirror developed for optical coherence tomography (OCT) application. We report large deflection angle of up to 30° that has been achieved at low input power of less than 17mW and voltage of less than 1V. Moreover, this device has a potential of integration with GaAs/Si substrate due to moderate temperatures developed during its operation-less than 100°C increase with respect to ambient at angular deflection of 30°.",

keywords = "Angular Deflection, Electrothermal Actuator, Micromirror, Multi-axis mirror, OCT imaging, Optical Scanner",

author = "Umer Izhar and Ooi, {Boon S.} and Svetlana Tatic-Lucic",

year = "2009",

month = sep,

doi = "10.1016/j.proche.2009.07.286",

language = "English (US)",

volume = "1",

pages = "1147--1150",

journal = "Procedia Chemistry",

issn = "1876-6196",

publisher = "Elsevier BV",

number = "1",

note = "Eurosensors 23rd Conference ; Conference date: 06-09-2009 Through 09-09-2009",

}

TY - JOUR

T1 - Multi-axis micromirror for optical coherence tomography

AU - Izhar, Umer

AU - Ooi, Boon S.

AU - Tatic-Lucic, Svetlana

PY - 2009/9

Y1 - 2009/9

N2 - In this paper we describe for the first time the design, fabrication and initial characterization results of a novel gimbal-less, thermally actuated micromirror developed for optical coherence tomography (OCT) application. We report large deflection angle of up to 30° that has been achieved at low input power of less than 17mW and voltage of less than 1V. Moreover, this device has a potential of integration with GaAs/Si substrate due to moderate temperatures developed during its operation-less than 100°C increase with respect to ambient at angular deflection of 30°.

AB - In this paper we describe for the first time the design, fabrication and initial characterization results of a novel gimbal-less, thermally actuated micromirror developed for optical coherence tomography (OCT) application. We report large deflection angle of up to 30° that has been achieved at low input power of less than 17mW and voltage of less than 1V. Moreover, this device has a potential of integration with GaAs/Si substrate due to moderate temperatures developed during its operation-less than 100°C increase with respect to ambient at angular deflection of 30°.

KW - Angular Deflection

KW - Electrothermal Actuator

KW - Micromirror

KW - Multi-axis mirror

KW - OCT imaging

KW - Optical Scanner

UR - http://www.scopus.com/inward/record.url?scp=71549125560&partnerID=8YFLogxK

U2 - 10.1016/j.proche.2009.07.286

DO - 10.1016/j.proche.2009.07.286

M3 - Conference article

AN - SCOPUS:71549125560

SN - 1876-6196

VL - 1

SP - 1147

EP - 1150

JO - Procedia Chemistry

JF - Procedia Chemistry

IS - 1

T2 - Eurosensors 23rd Conference

Y2 - 6 September 2009 through 9 September 2009

ER -

Multi-axis micromirror for optical coherence tomography

Abstract

Keywords

ASJC Scopus subject areas

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