Modulation of the work function of silicon gate electrode using thin TaN interlayers

H. N. Alshareef^*, H. C. Wen, H. R. Harris, K. Choi, H. F. Luan, P. Lysaght, P. Majhi, B. H. Lee, M. El-Bouanani, V. Ukride

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review