Modeling of MEMS piezoelectric energy harvesters using electromagnetic and power system theories

This work proposes a novel methodology for estimating the power output of piezoelectric generators. An analytical model that estimates for the first time the loss ratio and output power of piezoelectric generators based on the direct mechanical-to-electrical analogy, electromagnetic theory, and power system theory is developed. The mechanical-to-electrical analogy and power system theory allow the derivation of an equivalent input impedance expression for the network, whereas electromagnetic transmission line theory allows deduction of the equivalent electromechanical loss of the piezoelectric generator. By knowing the mechanical input power and the loss of the network, calculation of the output power of the piezoelectric device becomes a straightforward procedure. Experimental results based on published data are also presented to validate the analytical solution. In order to fully benefit from the well-established electromagnetic transmission line and electric circuit theories, further analyses on the resonant frequency, bandwidth, and sensitivity are presented. Compared to the conventional modeling methods currently being adopted in the literature, the proposed method provides significant additional information that is crucial for enhanced device operation and quick performance optimization. © 2011 IOP Publishing Ltd.