Micromachined Threshold Inertial Switches: A Review

Qiu Xu, Mohammad I. Younis

Research output: Contribution to journalArticlepeer-review

8 Scopus citations


This paper presents a review of the recent advances on micromachined inertial switches/triggers. The review focuses on their advantages and disadvantages, sensitive directions, mechanisms of contact-enhancement, threshold accuracy, and the tunability of the acceleration threshold. Several applications of these sensors are highlighted including in healthcare, structural health monitoring, internet of things (IoT), and military. Recent contemporary research directions are also discussed, such as multi-directions/axis, multi-threshold sensors, and machine learning implementation. The article concludes with discussion on future development trends and performance improvements of inertial switches.
Original languageEnglish (US)
JournalJournal of Micromechanics and Microengineering
StatePublished - Mar 28 2022

Bibliographical note

KAUST Repository Item: Exported on 2022-04-04
Acknowledgements: This publication is based upon work supported by King Abdullah University of Science and Technology (KAUST).

ASJC Scopus subject areas

  • Mechanics of Materials
  • Mechanical Engineering
  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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