Microfabrication of phase shifting zone plates for hard x-rays

V. White; S. Bajikar; D. Denton; F. Cerrina; B. Lai; W. B. Yun; D. Legnini; Y. Xiao; J. Chrzas; E. DiFabrizio; L. Grella; M. Baciocchi

doi:10.1016/0167-9317(93)90036-5

Microfabrication of phase shifting zone plates for hard x-rays

V. White^*, S. Bajikar, D. Denton, F. Cerrina, B. Lai, W. B. Yun, D. Legnini, Y. Xiao, J. Chrzas, E. DiFabrizio, L. Grella, M. Baciocchi

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Original language	English (US)
Pages (from-to)	99-102
Number of pages	4
Journal	Microelectronic Engineering
Volume	21
Issue number	1-4
DOIs	https://doi.org/10.1016/0167-9317(93)90036-5
State	Published - Apr 1993
Externally published	Yes

Bibliographical note

Funding Information:
This work was supported by a contract from Argonne National Laboratory, U.S. Department of Energy, W-31-109-ENG-38.

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

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10.1016/0167-9317(93)90036-5

Cite this

@article{69a5f025e2984c328e7be4d0fc673026,

title = "Microfabrication of phase shifting zone plates for hard x-rays",

author = "V. White and S. Bajikar and D. Denton and F. Cerrina and B. Lai and Yun, {W. B.} and D. Legnini and Y. Xiao and J. Chrzas and E. DiFabrizio and L. Grella and M. Baciocchi",

note = "Funding Information: This work was supported by a contract from Argonne National Laboratory, U.S. Department of Energy, W-31-109-ENG-38.",

year = "1993",

month = apr,

doi = "10.1016/0167-9317(93)90036-5",

language = "English (US)",

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pages = "99--102",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier B.V.",

number = "1-4",

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TY - JOUR

T1 - Microfabrication of phase shifting zone plates for hard x-rays

AU - White, V.

AU - Bajikar, S.

AU - Denton, D.

AU - Cerrina, F.

AU - Lai, B.

AU - Yun, W. B.

AU - Legnini, D.

AU - Xiao, Y.

AU - Chrzas, J.

AU - DiFabrizio, E.

AU - Grella, L.

AU - Baciocchi, M.

N1 - Funding Information: This work was supported by a contract from Argonne National Laboratory, U.S. Department of Energy, W-31-109-ENG-38.

PY - 1993/4

Y1 - 1993/4

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U2 - 10.1016/0167-9317(93)90036-5

DO - 10.1016/0167-9317(93)90036-5

M3 - Article

AN - SCOPUS:0027574723

SN - 0167-9317

VL - 21

SP - 99

EP - 102

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 1-4

ER -

Microfabrication of phase shifting zone plates for hard x-rays

Bibliographical note

ASJC Scopus subject areas

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