Microfabrication of phase shifting zone plates for hard x-rays

V. White*, S. Bajikar, D. Denton, F. Cerrina, B. Lai, W. B. Yun, D. Legnini, Y. Xiao, J. Chrzas, E. DiFabrizio, L. Grella, M. Baciocchi

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Scopus citations
Original languageEnglish (US)
Pages (from-to)99-102
Number of pages4
JournalMicroelectronic Engineering
Issue number1-4
StatePublished - Apr 1993
Externally publishedYes

Bibliographical note

Funding Information:
This work was supported by a contract from Argonne National Laboratory, U.S. Department of Energy, W-31-109-ENG-38.

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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