Microelectromechanical reprogrammable logic device

Md Abdullah Al Hafiz, Lakshmoji Kosuru, Mohammad I. Younis

Research output: Contribution to journalArticlepeer-review

136 Scopus citations


In modern computing, the Boolean logic operations are set by interconnect schemes between the transistors. As the miniaturization in the component level to enhance the computational power is rapidly approaching physical limits, alternative computing methods are vigorously pursued. One of the desired aspects in the future computing approaches is the provision for hardware reconfigurability at run time to allow enhanced functionality. Here we demonstrate a reprogrammable logic device based on the electrothermal frequency modulation scheme of a single microelectromechanical resonator, capable of performing all the fundamental 2-bit logic functions as well as n-bit logic operations. Logic functions are performed by actively tuning the linear resonance frequency of the resonator operated at room temperature and under modest vacuum conditions, reprogrammable by the a.c.-driving frequency. The device is fabricated using complementary metal oxide semiconductor compatible mass fabrication process, suitable for on-chip integration, and promises an alternative electromechanical computing scheme.
Original languageEnglish (US)
JournalNature Communications
Issue number1
StatePublished - Mar 29 2016

Bibliographical note

KAUST Repository Item: Exported on 2020-10-01
Acknowledgements: We acknowledge Ulrich Buttner, EMPIRe Lab at KAUST for helping with laser cutting
the chips. This research has been funded by KAUST.


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