Abstract
A method for manufacturing a photonic crystal device provided with a plasmonic waveguide includes: preparing a membrane; applying, in a programmed manner, a focused ion beam on the membrane, in a manner such as to obtain a photonic crystal made up by a regular planar arrangement of through holes positioned according to a preset lattice and also comprising a resonant cavity. The method also provides a conic plasmonic waveguide at the resonant cavity, through chemical vapour deposition induced by a focused electron beam. The focused electron beam that induces la deposition is controlled in such a manner to gradually reduce the transverse section of the electron beam starting from the base up to the tip of the projecting structure, maintaining the position of the electron beam constant.
| Original language | English (US) |
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| Patent number | US20120045578A1 |
| Priority date | 09/23/08 |
| State | Published - Feb 23 2012 |
| Externally published | Yes |