Metal wet etch process development for dual metal gate CMOS

Muhammad Mustafa Hussain*, Naim Moumen, Joel Barnett, Jason Saulters, David Baker, Zhibo Zhang

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

26 Scopus citations

Fingerprint

Dive into the research topics of 'Metal wet etch process development for dual metal gate CMOS'. Together they form a unique fingerprint.

Material Science

Keyphrases