Mesoporous thin films for chemical sensors

Plinio Innocenzi, Andrea Bearzotti, Enrico Traversa

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


Silica mesoporous thin-films were prepared using cetyltrimethylammonium bromide surfactant as a template. The films were deposited by dip-coating on Si and alumina substrates and calcined at 250 and 450°C. The films were characterized by X-ray diffraction (XRd) analysis, Fourier transform infrared (FTIR) spectroscopy and Rutherford backscattering spectrometry (RBS). The films maintained the mesophase after calcination. The electrical response of the silica mesoporous thin-films was studied at various concentrations of alcohols (methanol, ethanol, 2-propanol, butanol, and hexane). A large sensitivity to the alcohols at room temperature was observed, with the possibility to discriminate between the different alcoholic species. The films were also tested as humidity sensors and showed an increase in current intensity as a function of relative humidity, with a large response at low humidity values. No memory effects were observed after cyclic testing in dry-wet conditions. Electrical characterisation indicates that the mesophase is easily accessible by the external environment.

Original languageEnglish (US)
Title of host publicationCOMMAD 2000 Proceedings - Conference on Optoelectronic and Microelectronic Materials and Devices
EditorsLeonard D. Broekman, Brian F. Usher, John D. Riley
PublisherInstitute of Electrical and Electronics Engineers Inc.
Number of pages8
ISBN (Electronic)0780366980
StatePublished - 2000
Externally publishedYes
EventConference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2000 - Bundoora, Australia
Duration: Dec 6 2000Dec 8 2000

Publication series

NameConference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD


OtherConference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2000

Bibliographical note

Publisher Copyright:
© 2000 IEEE.

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials


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