MEMS variable capacitance devices utilizing the substrate: I. Novel devices with a customizable tuning range

Amro M. Elshurafa, Ezz I. El-Masry

    Research output: Contribution to journalArticlepeer-review

    6 Scopus citations

    Fingerprint

    Dive into the research topics of 'MEMS variable capacitance devices utilizing the substrate: I. Novel devices with a customizable tuning range'. Together they form a unique fingerprint.

    Material Science

    Physics

    Keyphrases

    Engineering