TY - PAT
T1 - MEMS mass-spring-damper systems using an out-of-plane suspension scheme
AU - Abdel Aziz, Ahmed Kamal Said
AU - Sharaf, Abdel Hameed
AU - Serry, Mohamed Yousef
AU - Sedky, Sherif Salah
N1 - KAUST Repository Item: Exported on 2019-02-13
PY - 2014/2/4
Y1 - 2014/2/4
N2 - MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) using an out-of-plane (or vertical) suspension scheme, wherein the suspensions are normal to the proof mass, are disclosed. Such out-of-plane suspension scheme helps such MEMS mass-spring-damper systems achieve inertial grade performance. Methods of fabricating out-of-plane suspensions in MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) are also disclosed.
AB - MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) using an out-of-plane (or vertical) suspension scheme, wherein the suspensions are normal to the proof mass, are disclosed. Such out-of-plane suspension scheme helps such MEMS mass-spring-damper systems achieve inertial grade performance. Methods of fabricating out-of-plane suspensions in MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) are also disclosed.
UR - http://hdl.handle.net/10754/594741
UR - http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=8640541
UR - http://assignment.uspto.gov/#/search?adv=patNum:8640541
UR - http://www.google.com/patents/US8640541
UR - http://worldwide.espacenet.com/publicationDetails/biblio?CC=US&NR=8640541B2&KC=B2&FT=D
M3 - Patent
M1 - US 8640541 B2
ER -