MEMS digital parametric loudspeaker

Armando Arpys Arevalo Carreno; David Castro; David Conchouso Gonzalez; Jürgen Kosel; Ian G. Foulds

doi:10.1109/MEMSYS.2016.7421826

MEMS digital parametric loudspeaker

Armando Arpys Arevalo Carreno, David Castro, David Conchouso Gonzalez, Jürgen Kosel, Ian G. Foulds

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

8 Scopus citations

Abstract

This paper reports on the design and fabrication of MEMS actuator arrays suitable for Digital Sound reconstruction and Parametric Directional Loudspeakers. Two distinct versions of the device were fabricated: one using the electrostatic principle actuation and the other one, the piezoelectric principle. Both versions used similar membrane dimensions, with a diameter of 500 μm. These devices are the smallest Micro-Machined Ultrasound Transducer (MUT) arrays that can be operated for both modes: Digital Sound Reconstruction and Parametric Loudspeaker. The chips consist of an array with 256 transducers, in a footprint of 12 mm by 12 mm. The total single chip size is: 2.3 cm by 2.3 cm, including the contact pads. © 2016 IEEE.

Original language	English (US)
Title of host publication	2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	1098-1101
Number of pages	4
ISBN (Print)	9781509019731
DOIs	https://doi.org/10.1109/MEMSYS.2016.7421826
State	Published - Mar 23 2016

Bibliographical note

KAUST Repository Item: Exported on 2020-10-01

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10.1109/MEMSYS.2016.7421826

Cite this

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title = "MEMS digital parametric loudspeaker",

abstract = "This paper reports on the design and fabrication of MEMS actuator arrays suitable for Digital Sound reconstruction and Parametric Directional Loudspeakers. Two distinct versions of the device were fabricated: one using the electrostatic principle actuation and the other one, the piezoelectric principle. Both versions used similar membrane dimensions, with a diameter of 500 μm. These devices are the smallest Micro-Machined Ultrasound Transducer (MUT) arrays that can be operated for both modes: Digital Sound Reconstruction and Parametric Loudspeaker. The chips consist of an array with 256 transducers, in a footprint of 12 mm by 12 mm. The total single chip size is: 2.3 cm by 2.3 cm, including the contact pads. {\textcopyright} 2016 IEEE.",

author = "Carreno, {Armando Arpys Arevalo} and David Castro and {Conchouso Gonzalez}, David and J{\"u}rgen Kosel and Foulds, {Ian G.}",

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AU - Carreno, Armando Arpys Arevalo

AU - Castro, David

AU - Conchouso Gonzalez, David

AU - Kosel, Jürgen

AU - Foulds, Ian G.

N1 - KAUST Repository Item: Exported on 2020-10-01

PY - 2016/3/23

Y1 - 2016/3/23

N2 - This paper reports on the design and fabrication of MEMS actuator arrays suitable for Digital Sound reconstruction and Parametric Directional Loudspeakers. Two distinct versions of the device were fabricated: one using the electrostatic principle actuation and the other one, the piezoelectric principle. Both versions used similar membrane dimensions, with a diameter of 500 μm. These devices are the smallest Micro-Machined Ultrasound Transducer (MUT) arrays that can be operated for both modes: Digital Sound Reconstruction and Parametric Loudspeaker. The chips consist of an array with 256 transducers, in a footprint of 12 mm by 12 mm. The total single chip size is: 2.3 cm by 2.3 cm, including the contact pads. © 2016 IEEE.

AB - This paper reports on the design and fabrication of MEMS actuator arrays suitable for Digital Sound reconstruction and Parametric Directional Loudspeakers. Two distinct versions of the device were fabricated: one using the electrostatic principle actuation and the other one, the piezoelectric principle. Both versions used similar membrane dimensions, with a diameter of 500 μm. These devices are the smallest Micro-Machined Ultrasound Transducer (MUT) arrays that can be operated for both modes: Digital Sound Reconstruction and Parametric Loudspeaker. The chips consist of an array with 256 transducers, in a footprint of 12 mm by 12 mm. The total single chip size is: 2.3 cm by 2.3 cm, including the contact pads. © 2016 IEEE.

UR - http://hdl.handle.net/10754/621323

UR - http://ieeexplore.ieee.org/document/7421826

UR - http://www.scopus.com/inward/record.url?scp=84971010770&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2016.7421826

DO - 10.1109/MEMSYS.2016.7421826

M3 - Conference contribution

SN - 9781509019731

SP - 1098

EP - 1101

BT - 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)

PB - Institute of Electrical and Electronics Engineers (IEEE)

ER -

MEMS digital parametric loudspeaker

Abstract

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