MEMS Coupled Resonator for Filter Application in Air

Saad Ilyas; Nizar Jaber; Mohammad I. Younis

doi:10.1115/DETC2017-67875

MEMS Coupled Resonator for Filter Application in Air

Saad Ilyas, Nizar Jaber, Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We present a mechanically coupled MEMS H resonator capable of performing simultaneous amplification and filter operation in air. The device comprises of two doubly clamped polyimide microbeams joined through the middle by a coupling beam of the same size. The resonator is fabricated via a multilayer surface micromachining process. A special fabrication process and device design is employed to enable the device's operation in air and to achieve mechanical amplification of the output response. Moreover, mixed-frequency excitation is used to demonstrate a tunable wide band filter. The device design combined with the mixed-frequency excitation is used to demonstrate simultaneous amplification and filtering in air.

Original language	English (US)
Title of host publication	Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems
Publisher	ASME International
ISBN (Print)	9780791858165
DOIs	https://doi.org/10.1115/DETC2017-67875
State	Published - Nov 3 2017

Bibliographical note

KAUST Repository Item: Exported on 2020-10-01
Acknowledgements: This work has been supported through King Abdullah University of Science and Technology (KAUST) research funds.

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10.1115/DETC2017-67875

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title = "MEMS Coupled Resonator for Filter Application in Air",

abstract = "We present a mechanically coupled MEMS H resonator capable of performing simultaneous amplification and filter operation in air. The device comprises of two doubly clamped polyimide microbeams joined through the middle by a coupling beam of the same size. The resonator is fabricated via a multilayer surface micromachining process. A special fabrication process and device design is employed to enable the device's operation in air and to achieve mechanical amplification of the output response. Moreover, mixed-frequency excitation is used to demonstrate a tunable wide band filter. The device design combined with the mixed-frequency excitation is used to demonstrate simultaneous amplification and filtering in air.",

author = "Saad Ilyas and Nizar Jaber and Younis, {Mohammad I.}",

note = "KAUST Repository Item: Exported on 2020-10-01 Acknowledgements: This work has been supported through King Abdullah University of Science and Technology (KAUST) research funds.",

year = "2017",

month = nov,

day = "3",

doi = "10.1115/DETC2017-67875",

language = "English (US)",

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T1 - MEMS Coupled Resonator for Filter Application in Air

AU - Ilyas, Saad

AU - Jaber, Nizar

AU - Younis, Mohammad I.

N1 - KAUST Repository Item: Exported on 2020-10-01 Acknowledgements: This work has been supported through King Abdullah University of Science and Technology (KAUST) research funds.

PY - 2017/11/3

Y1 - 2017/11/3

N2 - We present a mechanically coupled MEMS H resonator capable of performing simultaneous amplification and filter operation in air. The device comprises of two doubly clamped polyimide microbeams joined through the middle by a coupling beam of the same size. The resonator is fabricated via a multilayer surface micromachining process. A special fabrication process and device design is employed to enable the device's operation in air and to achieve mechanical amplification of the output response. Moreover, mixed-frequency excitation is used to demonstrate a tunable wide band filter. The device design combined with the mixed-frequency excitation is used to demonstrate simultaneous amplification and filtering in air.

AB - We present a mechanically coupled MEMS H resonator capable of performing simultaneous amplification and filter operation in air. The device comprises of two doubly clamped polyimide microbeams joined through the middle by a coupling beam of the same size. The resonator is fabricated via a multilayer surface micromachining process. A special fabrication process and device design is employed to enable the device's operation in air and to achieve mechanical amplification of the output response. Moreover, mixed-frequency excitation is used to demonstrate a tunable wide band filter. The device design combined with the mixed-frequency excitation is used to demonstrate simultaneous amplification and filtering in air.

UR - http://hdl.handle.net/10754/626793

UR - http://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=2662169

UR - http://www.scopus.com/inward/record.url?scp=85034765636&partnerID=8YFLogxK

U2 - 10.1115/DETC2017-67875

DO - 10.1115/DETC2017-67875

M3 - Conference contribution

AN - SCOPUS:85034765636

SN - 9780791858165

BT - Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems

PB - ASME International

ER -

MEMS Coupled Resonator for Filter Application in Air

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