MEMS Coupled Resonator for Filter Application in Air

Saad Ilyas, Nizar Jaber, Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present a mechanically coupled MEMS H resonator capable of performing simultaneous amplification and filter operation in air. The device comprises of two doubly clamped polyimide microbeams joined through the middle by a coupling beam of the same size. The resonator is fabricated via a multilayer surface micromachining process. A special fabrication process and device design is employed to enable the device's operation in air and to achieve mechanical amplification of the output response. Moreover, mixed-frequency excitation is used to demonstrate a tunable wide band filter. The device design combined with the mixed-frequency excitation is used to demonstrate simultaneous amplification and filtering in air.
Original languageEnglish (US)
Title of host publicationVolume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems
PublisherASME International
ISBN (Print)9780791858165
DOIs
StatePublished - Nov 3 2017

Bibliographical note

KAUST Repository Item: Exported on 2020-10-01
Acknowledgements: This work has been supported through King Abdullah University of Science and Technology (KAUST) research funds.

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