MEMS based impedimetric sensing of phthalates

Asif I. Zia, A. R. Mohd. Syaifudin, Subhas Chandra Mukhopadhyay, Ibrahim H. Al-Bahadly, Paklam Yu, Chinthaka Pasan Gooneratne, Jürgen Kosel, Taishan Liao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

20 Scopus citations


Phthalate esters are known ubiquitous teratogenic and carcinogenic environmental and food pollutants. Their detection and quantification is strictly laboratory based, time consuming, expensive and professionally handled procedure. Presented research work describes a real time non-invasive detection technique for phthalates detection in ethanol, water and drinks. The new type of inter-digital sensor design incorporating multiple sensing gold electrodes were fabricated on silicon substrate based on thin film micro-electromechanical system (MEMS) using semiconductor device fabrication technology. A passivation layer of Silicon Nitride (Si3N4) was used to functionalize the sensor. Various concentrations (0.1 to 20ppm) of DINP (di-isononyl phthalates) in ethanol and di (2-ethylhexyl) phthalate (DEHP) in deionized MilliQ water were subjected to the testing system by dip testing method. Electrochemical impedance spectroscopy (EIS) technique was used to obtain impedance spectra in order to determine sample conductance for evaluation of its dielectric properties. The impedance spectra so obtained showed that the sensor was able to detect the presence of phthalates in the samples distinctively. Electrochemical Spectrum Analyser was used to model the experimentally obtained impedance spectra by curve fitting technique to figure out Constant Phase Element (CPE) equivalent circuit. Locally available energy drink and juice was added with phthalates in concentrations of 2, 6 and 10ppm to observe the performance of the sensor in such products. Experimental results showed that the new sensor was able to detect different concentrations of phthalates in energy drinks. © 2013 IEEE.
Original languageEnglish (US)
Title of host publication2013 IEEE International Instrumentation and Measurement Technology Conference (I2MTC)
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Number of pages6
ISBN (Print)9781467346221
StatePublished - May 2013

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KAUST Repository Item: Exported on 2020-10-01


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