Abstract
Over the past years, this laboratory has designed a number of novel chemically amplified photoresists. Many contained molecules with latent electrophilic groups capable of crosslinking aromatic polymers. These groups are activated to carbocationic intermediates by addition of proton generated through irradiation of onium salts. A typical formulation contains poly(4-hydroxystyrene), a small molecule crosslinker and an onium salt. It is apparent that the rate determining step of the crosslinking reaction is the substitution of the benzylic alcohol hydroxyl group by poly(4-hydroxystyrene). In his paper a crosslinker was selected for subsequent study. The phenolic OH group is expected to give increased delocalization of the positive charge by its positive mesomeric effect. In addition, the resist will be fully aqueous base developable due to the solubility of phenols in base.
Original language | English (US) |
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Title of host publication | Polymeric Materials Science and Engineering, Proceedings of the ACS Division of Polymeric Materials Science and Engineering |
Publisher | Publ by ACS |
Pages | 32-33 |
Number of pages | 2 |
Volume | 68 |
ISBN (Print) | 0841226644 |
State | Published - 1993 |
Externally published | Yes |
Event | Proceedings of the American Chemical Society Division of Polymeric Materials - Science and Engineering - Denver, CO, USA Duration: Apr 18 1993 → Apr 23 1993 |
Other
Other | Proceedings of the American Chemical Society Division of Polymeric Materials - Science and Engineering |
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City | Denver, CO, USA |
Period | 04/18/93 → 04/23/93 |
ASJC Scopus subject areas
- Chemical Engineering (miscellaneous)
- Polymers and Plastics