Mechanically flexible optically transparent silicon fabric with high thermal budget devices from bulk silicon (100)

Keyphrases

• Optical Transparency 100%
• High Thermals 100%
• Thermal Budget 100%
• Silicon-based 50%
• Ultralarge-scale Integration 50%
• Process Compatibility 50%
• Medical Electronics 50%
• CMOS Process 50%
• Mobile Computation 50%
• Reactive Ion Etching 50%
• Sidewall 50%
• Bending Radius 50%
• Isotropic Etching 50%
• Release Process 50%
• Semiconductor Industry 50%
• Advanced Materials 50%
• Semiconductor Technology 50%
• Age of Information 50%
• External Support 50%
• Silicon Electronics 50%
• Electronics Industry 50%
• Low-cost Substrates 50%
• Semitransparent 50%
• Batch Fabrication 50%
• Art Process 50%
• Dielectric 50%

Engineering

• Silicon Substrate 100%
• Bulk Silicon 100%
• Anisotropic 50%
• Bending Radius 50%
• Side Wall 50%
• ULSI Circuits 50%
• Release Process 50%
• Dielectrics 50%
• Supports 50%
• Electronics Industry 50%
• Flexible Electronics 50%
• Medical Electronics 50%

Material Science

• Bulk Silicon 100%
• Transistor 100%
• Dielectric Material 50%
• Crystalline Material 50%
• Reactive Ion Etching 50%
• Advanced Material 50%