Mechanical Properties of Hard SiCN Coatings Prepared by PECVD

P. Jedrzejowski*, J. Cizek, Aram Amassian, J. E. Klemberg-Sapieha, J. Vlcek, L. Martinu

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

2 Scopus citations

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Material Science