Mechanical Properties of Hard SiCN Coatings Prepared by PECVD

P. Jedrzejowski*, J. Cizek, A. Amassian, J. E. Klemberg-Sapieha, J. Vlcek, L. Martinu

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

2 Scopus citations


Amorphous SiCN coatings are becoming increasingly attractive because of their mechanical, optical and electronic properties. In the present work, SiCN films were fabricated by PECVD from SiH4/CH4/N 2/Ar gas mixtures at a temperature of 400°C. Mechanical characteristics such as hardness, Young's modulus, friction coefficient and stress were evaluated, respectively, by depth-sensing indentation, pin-on-disk, and curvature methods. Films deposited under optimized conditions exhibited a hardness of > 30 GPa, Young's modulus of > 190 GPa, elastic rebound of 85 %, and a compressive stress of about 1 GPa. The friction coefficient against Al2O3 was found to vary from 0.70 to 0.25. The film behavior is correlated with the microstructure and composition determined by ERD, IR spectroscopic ellipsometry, XPS and SEM.

Original languageEnglish (US)
Pages (from-to)530-534
Number of pages5
JournalProceedings, Annual Technical Conference - Society of Vacuum Coaters
StatePublished - 2003
Externally publishedYes
Event46th Annual Technical Conference Proceedings - San Francisco, CA, United States
Duration: May 3 2003May 8 2003


  • Infrared spectroscopic ellipsometry
  • Mechanical properties
  • Microstructure

ASJC Scopus subject areas

  • Mechanical Engineering
  • Surfaces and Interfaces
  • Fluid Flow and Transfer Processes
  • Surfaces, Coatings and Films


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