Mechanical Properties of Hard SiCN Coatings Prepared by PECVD

P. Jedrzejowski; J. Cizek; A. Amassian; J. E. Klemberg-Sapieha; J. Vlcek; L. Martinu

Mechanical Properties of Hard SiCN Coatings Prepared by PECVD

P. Jedrzejowski^*, J. Cizek, A. Amassian, J. E. Klemberg-Sapieha, J. Vlcek, L. Martinu

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

2 Scopus citations

Abstract

Amorphous SiCN coatings are becoming increasingly attractive because of their mechanical, optical and electronic properties. In the present work, SiCN films were fabricated by PECVD from SiH₄/CH₄/N ₂/Ar gas mixtures at a temperature of 400°C. Mechanical characteristics such as hardness, Young's modulus, friction coefficient and stress were evaluated, respectively, by depth-sensing indentation, pin-on-disk, and curvature methods. Films deposited under optimized conditions exhibited a hardness of > 30 GPa, Young's modulus of > 190 GPa, elastic rebound of 85 %, and a compressive stress of about 1 GPa. The friction coefficient against Al₂O₃ was found to vary from 0.70 to 0.25. The film behavior is correlated with the microstructure and composition determined by ERD, IR spectroscopic ellipsometry, XPS and SEM.

Original language	English (US)
Pages (from-to)	530-534
Number of pages	5
Journal	Proceedings, Annual Technical Conference - Society of Vacuum Coaters
State	Published - 2003
Externally published	Yes
Event	46th Annual Technical Conference Proceedings - San Francisco, CA, United States Duration: May 3 2003 → May 8 2003

Keywords

Infrared spectroscopic ellipsometry
Mechanical properties
Microstructure
PECVD

ASJC Scopus subject areas

Mechanical Engineering
Surfaces and Interfaces
Fluid Flow and Transfer Processes
Surfaces, Coatings and Films

Cite this

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title = "Mechanical Properties of Hard SiCN Coatings Prepared by PECVD",

abstract = "Amorphous SiCN coatings are becoming increasingly attractive because of their mechanical, optical and electronic properties. In the present work, SiCN films were fabricated by PECVD from SiH4/CH4/N 2/Ar gas mixtures at a temperature of 400°C. Mechanical characteristics such as hardness, Young's modulus, friction coefficient and stress were evaluated, respectively, by depth-sensing indentation, pin-on-disk, and curvature methods. Films deposited under optimized conditions exhibited a hardness of > 30 GPa, Young's modulus of > 190 GPa, elastic rebound of 85 %, and a compressive stress of about 1 GPa. The friction coefficient against Al2O3 was found to vary from 0.70 to 0.25. The film behavior is correlated with the microstructure and composition determined by ERD, IR spectroscopic ellipsometry, XPS and SEM.",

keywords = "Infrared spectroscopic ellipsometry, Mechanical properties, Microstructure, PECVD",

author = "P. Jedrzejowski and J. Cizek and A. Amassian and Klemberg-Sapieha, {J. E.} and J. Vlcek and L. Martinu",

year = "2003",

language = "English (US)",

pages = "530--534",

journal = "Proceedings, Annual Technical Conference - Society of Vacuum Coaters",

issn = "0737-5921",

publisher = "Society of Vacuum Coaters",

note = "46th Annual Technical Conference Proceedings ; Conference date: 03-05-2003 Through 08-05-2003",

}

TY - JOUR

T1 - Mechanical Properties of Hard SiCN Coatings Prepared by PECVD

AU - Jedrzejowski, P.

AU - Cizek, J.

AU - Amassian, A.

AU - Klemberg-Sapieha, J. E.

AU - Vlcek, J.

AU - Martinu, L.

PY - 2003

Y1 - 2003

N2 - Amorphous SiCN coatings are becoming increasingly attractive because of their mechanical, optical and electronic properties. In the present work, SiCN films were fabricated by PECVD from SiH4/CH4/N 2/Ar gas mixtures at a temperature of 400°C. Mechanical characteristics such as hardness, Young's modulus, friction coefficient and stress were evaluated, respectively, by depth-sensing indentation, pin-on-disk, and curvature methods. Films deposited under optimized conditions exhibited a hardness of > 30 GPa, Young's modulus of > 190 GPa, elastic rebound of 85 %, and a compressive stress of about 1 GPa. The friction coefficient against Al2O3 was found to vary from 0.70 to 0.25. The film behavior is correlated with the microstructure and composition determined by ERD, IR spectroscopic ellipsometry, XPS and SEM.

AB - Amorphous SiCN coatings are becoming increasingly attractive because of their mechanical, optical and electronic properties. In the present work, SiCN films were fabricated by PECVD from SiH4/CH4/N 2/Ar gas mixtures at a temperature of 400°C. Mechanical characteristics such as hardness, Young's modulus, friction coefficient and stress were evaluated, respectively, by depth-sensing indentation, pin-on-disk, and curvature methods. Films deposited under optimized conditions exhibited a hardness of > 30 GPa, Young's modulus of > 190 GPa, elastic rebound of 85 %, and a compressive stress of about 1 GPa. The friction coefficient against Al2O3 was found to vary from 0.70 to 0.25. The film behavior is correlated with the microstructure and composition determined by ERD, IR spectroscopic ellipsometry, XPS and SEM.

KW - Infrared spectroscopic ellipsometry

KW - Mechanical properties

KW - Microstructure

KW - PECVD

UR - http://www.scopus.com/inward/record.url?scp=0242290390&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0242290390

SN - 0737-5921

SP - 530

EP - 534

JO - Proceedings, Annual Technical Conference - Society of Vacuum Coaters

JF - Proceedings, Annual Technical Conference - Society of Vacuum Coaters

T2 - 46th Annual Technical Conference Proceedings

Y2 - 3 May 2003 through 8 May 2003

ER -

Mechanical Properties of Hard SiCN Coatings Prepared by PECVD

Abstract

Keywords

ASJC Scopus subject areas

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