Abstract
Amorphous SiCN coatings are becoming increasingly attractive because of their mechanical, optical and electronic properties. In the present work, SiCN films were fabricated by PECVD from SiH 4 /CH 4 /N 2 /Ar gas mixtures at a temperature of 400°C. Mechanical characteristics such as hardness, Young's modulus, friction coefficient and stress were evaluated, respectively, by depth-sensing indentation, pin-on-disk, and curvature methods. Films deposited under optimized conditions exhibited a hardness of > 30 GPa, Young's modulus of > 190 GPa, elastic rebound of 85 %, and a compressive stress of about 1 GPa. The friction coefficient against Al 2 O 3 was found to vary from 0.70 to 0.25. The film behavior is correlated with the microstructure and composition determined by ERD, IR spectroscopic ellipsometry, XPS and SEM.
Original language | English (US) |
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Pages (from-to) | 530-534 |
Number of pages | 5 |
Journal | Proceedings, Annual Technical Conference - Society of Vacuum Coaters |
State | Published - Nov 10 2003 |
Event | 46th Annual Technical Conference Proceedings - San Francisco, CA, United States Duration: May 3 2003 → May 8 2003 |
Keywords
- Infrared spectroscopic ellipsometry
- Mechanical properties
- Microstructure
- PECVD
ASJC Scopus subject areas
- Mechanical Engineering
- Surfaces and Interfaces
- Fluid Flow and Transfer Processes
- Surfaces, Coatings and Films