Mass and position determination in MEMS mass sensors: a theoretical and an experimental investigation

Engineering

• Experimental Investigation 100%
• Closed Form Expression 50%
• Theoretical Investigation 50%
• Experimental Measurement 50%
• Resonance Frequency 50%
• Perturbation Technique 50%
• Added Mass 50%
• Mode of Vibration 50%
• Determines 50%
• Bernoulli Beam 50%
• Frequency Shift 50%

Keyphrases

• MEMS Mass Sensor 100%