Magnetron sputtered TiN thin films toward enhanced performance supercapacitor electrodes

Binbin Wei, Hanfeng Liang, Dongfang Zhang, Zhengbing Qi, Hao Shen, Zhoucheng Wang

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34 Scopus citations


Supercapacitors as a new type of energy storage devices bridging the gap between conventional capacitors and batteries have aroused widespread concern. Herein, binder-free titanium nitride (TiN) thin film electrodes for supercapacitors prepared by reactive magnetron sputtering technology are reported. The effect of N2 content on the supercapacitor performance is evaluated. A highest specific capacitance of 27.3 mF cm−2 at a current density of 1.0 mA cm−2, together with excellent cycling performance (98.2% capacitance retention after 20,000 cycles at 2.0 mA cm−2) is achieved in a 0.5 M H2SO4 aqueous electrolyte. More importantly, a symmetric supercapacitor device assembled on the basis of TiN thin films can deliver a maximum energy density of 17.6 mWh cm−3 at a current density of 0.2 mA cm−2 and a maximum power density of 10.8 W cm−3 at a current density of 2 mA cm−2 with remarkable cycling stability. As a consequence, TiN thin films demonstrate great potential as promising supercapacitor electrode materials.
Original languageEnglish (US)
JournalMaterials for Renewable and Sustainable Energy
Issue number2
StatePublished - Apr 9 2018

Bibliographical note

KAUST Repository Item: Exported on 2020-10-01
Acknowledgements: This research is financially supported by the National Nature Science Foundation of China (Nos. 51372212, 51601163).


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