Original language | English (US) |
---|---|
Pages (from-to) | 112966 |
Journal | Sensors and Actuators A: Physical |
DOIs | |
State | Published - Jul 2021 |
Bibliographical note
KAUST Repository Item: Exported on 2021-07-12Acknowledgements: This work was supported by King Abdullah University of Science and Technology (KAUST) through the Sensor Initiative. We thank colleagues at KAUST for discussion and collaboration. Y.Z. acknowledges support from Fermilab-Graduate Instrumentation Research Award from DOE grant number DE-AC05-00OR22725. We used the Heidelberg MLA150 Maskless Aligner, which was under the support of a National Science Foundation Grant No. DMR-1827453.
ASJC Scopus subject areas
- Instrumentation
- Surfaces, Coatings and Films
- Metals and Alloys
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering
- Condensed Matter Physics