Liquid Dielectric Electrostatic Mems Switch And Method Of Fabrication Thereof

Mohammed A. Zidan; Jürgen Kosel; Khaled N. Salama

Liquid Dielectric Electrostatic Mems Switch And Method Of Fabrication Thereof

Mohammed A. Zidan (Inventor), Jürgen Kosel (Inventor), Khaled N. Salama (Inventor)

Research output: Patent

Abstract

A microelectromechanical system (MEMS) switch with liquid dielectric and a method of fabrication thereof are provided. In the context of the MEMS switch, a MEMS switch is provided including a cantilevered source switch, a first actuation gate disposed parallel to the cantilevered source switch, a first drain disposed parallel to a movable end of the cantilevered source switch, and a liquid dielectric disposed within a housing of the microelectromechanical system switch.

Original language	English (US)
Patent number	US20180174788A1
State	Published - Jun 21 2018

Bibliographical note

KAUST Repository Item: Exported on 2019-02-13

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https://repository.kaust.edu.sa/bitstream/10754/629635/1/US20180174788A1.pdf

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title = "Liquid Dielectric Electrostatic Mems Switch And Method Of Fabrication Thereof",

abstract = "A microelectromechanical system (MEMS) switch with liquid dielectric and a method of fabrication thereof are provided. In the context of the MEMS switch, a MEMS switch is provided including a cantilevered source switch, a first actuation gate disposed parallel to the cantilevered source switch, a first drain disposed parallel to a movable end of the cantilevered source switch, and a liquid dielectric disposed within a housing of the microelectromechanical system switch.",

author = "Zidan, {Mohammed A.} and J{\"u}rgen Kosel and Salama, {Khaled N.}",

note = "KAUST Repository Item: Exported on 2019-02-13; US20180174788A1",

year = "2018",

month = jun,

day = "21",

language = "English (US)",

type = "Patent",

}

TY - PAT

T1 - Liquid Dielectric Electrostatic Mems Switch And Method Of Fabrication Thereof

AU - Zidan, Mohammed A.

AU - Kosel, Jürgen

AU - Salama, Khaled N.

N1 - KAUST Repository Item: Exported on 2019-02-13

PY - 2018/6/21

Y1 - 2018/6/21

N2 - A microelectromechanical system (MEMS) switch with liquid dielectric and a method of fabrication thereof are provided. In the context of the MEMS switch, a MEMS switch is provided including a cantilevered source switch, a first actuation gate disposed parallel to the cantilevered source switch, a first drain disposed parallel to a movable end of the cantilevered source switch, and a liquid dielectric disposed within a housing of the microelectromechanical system switch.

AB - A microelectromechanical system (MEMS) switch with liquid dielectric and a method of fabrication thereof are provided. In the context of the MEMS switch, a MEMS switch is provided including a cantilevered source switch, a first actuation gate disposed parallel to the cantilevered source switch, a first drain disposed parallel to a movable end of the cantilevered source switch, and a liquid dielectric disposed within a housing of the microelectromechanical system switch.

UR - http://hdl.handle.net/10754/629635

UR - https://patents.google.com/patent/US20180174788A1/en

M3 - Patent

M1 - US20180174788A1

ER -

Liquid Dielectric Electrostatic Mems Switch And Method Of Fabrication Thereof

Abstract

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