Large-Area Metal-Semiconductor Heterojunctions Realized via MXene-Induced Two-Dimensional Surface Polarization

Tianchao Guo, Xiangming Xu, Chen Liu, Yizhou Wang, Yongjiu Lei, Bin Fang, Lin Shi, Hang Liu, Mrinal K. Hota, Hala A. Al-Jawhari, Xixiang Zhang, Husam N. Alshareef*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Scopus citations


Direct MXene deposition on large-area 2D semiconductor surfaces can provide design versatility for the fabrication of MXene-based electronic devices (MXetronics). However, it is challenging to deposit highly uniform wafer-scale hydrophilic MXene films (e.g., Ti3C2Tx) on hydrophobic 2D semiconductor channel materials (e.g., MoS2). Here, we demonstrate a modified drop-casting (MDC) process for the deposition of MXene on MoS2 without any pretreatment, which typically degrades the quality of either MXene or MoS2. Different from the traditional drop-casting method, which usually forms rough and thick films at the micrometer scale, our MDC method can form an ultrathin Ti3C2Tx film (ca. 10 nm) based on a MXene-introduced MoS2 surface polarization phenomenon. In addition, our MDC process does not require any pretreatment, unlike MXene spray-coating that usually requires a hydrophilic pretreatment of the substrate surface before deposition. This process offers a significant advantage for Ti3C2Tx film deposition on UV-ozone- or O2-plasma-sensitive surfaces. Using the MDC process, we fabricated wafer-scale n-type Ti3C2Tx-MoS2 van der Waals heterojunction transistors, achieving an average effective electron mobility of ∼40 cm2·V-1·s-1, on/off current ratios exceeding 104, and subthreshold swings of under 200 mV·dec-1. The proposed MDC process can considerably enhance the applications of MXenes, especially the design of MXene/semiconductor nanoelectronics.

Original languageEnglish (US)
Pages (from-to)8324-8332
Number of pages9
JournalACS Nano
Issue number9
StatePublished - May 9 2023

Bibliographical note

Funding Information:
Research reported in this publication was supported by King Abdullah University of Science and Technology (KAUST). The authors thank the core laboratory and the imaging and characterization staff at KAUST for their support.

Publisher Copyright:
© 2023 The Authors. Published by American Chemical Society.


  • MoS
  • surface polarization
  • thin film
  • TiCT MXene
  • transistor

ASJC Scopus subject areas

  • General Materials Science
  • General Engineering
  • General Physics and Astronomy


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