L'AMPLIFICATION CHIMIQUE APPLIQUEE AU DEVELOPPEMENT DE POLYMERES UTILISABLES COMME RESINES DE LITHOGRAPHIE.

Translated title of the contribution: Chemical Amplification in the Design of Polymers for Resist Application.

C. Grant Willson^*, Hiroshi Ito, J. M J Frechet

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

4 Scopus citations

Translated title of the contribution	Chemical Amplification in the Design of Polymers for Resist Application.
Original language	French
Title of host publication	Unknown Host Publication Title
Publisher	Comite du Colloque Int sur la Microlithographie
Pages	261
Number of pages	1
State	Published - 1982
Externally published	Yes

ASJC Scopus subject areas

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title = "L'AMPLIFICATION CHIMIQUE APPLIQUEE AU DEVELOPPEMENT DE POLYMERES UTILISABLES COMME RESINES DE LITHOGRAPHIE.",

author = "Willson, {C. Grant} and Hiroshi Ito and Frechet, {J. M J}",

year = "1982",

language = "French",

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publisher = "Comite du Colloque Int sur la Microlithographie",

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AU - Frechet, J. M J

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PB - Comite du Colloque Int sur la Microlithographie

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