Kinetic growth of self-formed In2O3 nanodots via phase segregation: Ni/InAs system

Chin Hung Liu, Szu Ying Chen, Cheng Ying Chen, Jr Hau He, Lih Juann Chen, Johnny C. Ho*, Yu Lun Chueh

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

6 Scopus citations


Highly compact In2O3 nanodots with uniform size were synthesized by a novel approach via direct annealing of Ni/InAs samples at temperatures over 250 °C. The In2O3 nanodots were formed by solid diffusion between nickel and indium arsenide (InAs) and phase segregation via a catalyst-assisted kinetic process. By controlling the annealing time and ambient conditions, the size and density of In 2O3 nanodots can be controlled. From photoluminescence (PL) measurements, two distinct peaks located at ∼430 and ∼850 nm, corresponding to 2.9 and 1.5 eV for In2O3 nanodots, can be observed. The peaks originate from radioactive recombination centers such as oxygen vacancies or indium interstitials inside In2O3 nanodots. The periodic array of Ni microdiscs with diameters and interdisc spacing of ∼5 and ∼10 μm on InAs substrate surface prepared by a photolithography process demonstrated the precise control of In 2O3 nanodots at a specific position. Applications for precisely locating optoelectronic nanodevices in combination with electronic nanodevices are envisioned.

Original languageEnglish (US)
Pages (from-to)6637-6642
Number of pages6
JournalACS Nano
Issue number8
StatePublished - Aug 23 2011
Externally publishedYes


  • InAs
  • InO nanodot
  • NixInAs
  • catalyst-assisted kinetic process
  • phase segregation

ASJC Scopus subject areas

  • General Materials Science
  • General Engineering
  • General Physics and Astronomy


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