Investigation of the Dynamics of a Clamped-Clamped Microbeam Near the Third Mode Using a Partial Electrode

Karim M. Masri; Mohammad I. Younis

doi:10.1115/DETC2014-34923

Investigation of the Dynamics of a Clamped-Clamped Microbeam Near the Third Mode Using a Partial Electrode

Karim M. Masri, Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We present an investigation of the dynamics of a clamped-clamped microbeam excited electrostatically near its third mode. To maximize the response at the third mode, a partial electrode configuration is utilized. A multi-mode Galerkin method is used to develop a reduced order model (ROM) of the beam. A shooting method to find the periodic motion is utilized to generate frequency response curves. The curves show hardenining behavior and dynamic pull-in. We show that the dynamic amplitude of the partial configuration is higher than that of a full electrode configuration. These results are promising for the use of higher-order modes for mass detection and for ultra sensitive resonant sensors.

Original language	English (US)
Title of host publication	Volume 6: 10th International Conference on Multibody Systems, Nonlinear Dynamics, and Control
Publisher	ASME International
ISBN (Print)	9780791846391
DOIs	https://doi.org/10.1115/DETC2014-34923
State	Published - Aug 17 2014

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KAUST Repository Item: Exported on 2020-10-01

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10.1115/DETC2014-34923

https://repository.kaust.edu.sa/bitstream/10754/593273/1/V006T10A077-DETC2014-34923.pdf

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@inproceedings{a5d3cafacf654ad2bfbe02a396eb7f33,

title = "Investigation of the Dynamics of a Clamped-Clamped Microbeam Near the Third Mode Using a Partial Electrode",

abstract = "We present an investigation of the dynamics of a clamped-clamped microbeam excited electrostatically near its third mode. To maximize the response at the third mode, a partial electrode configuration is utilized. A multi-mode Galerkin method is used to develop a reduced order model (ROM) of the beam. A shooting method to find the periodic motion is utilized to generate frequency response curves. The curves show hardenining behavior and dynamic pull-in. We show that the dynamic amplitude of the partial configuration is higher than that of a full electrode configuration. These results are promising for the use of higher-order modes for mass detection and for ultra sensitive resonant sensors.",

author = "Masri, {Karim M.} and Younis, {Mohammad I.}",

note = "KAUST Repository Item: Exported on 2020-10-01",

year = "2014",

month = aug,

day = "17",

doi = "10.1115/DETC2014-34923",

language = "English (US)",

isbn = "9780791846391",

booktitle = "Volume 6: 10th International Conference on Multibody Systems, Nonlinear Dynamics, and Control",

publisher = "ASME International",

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T1 - Investigation of the Dynamics of a Clamped-Clamped Microbeam Near the Third Mode Using a Partial Electrode

AU - Masri, Karim M.

AU - Younis, Mohammad I.

N1 - KAUST Repository Item: Exported on 2020-10-01

PY - 2014/8/17

Y1 - 2014/8/17

N2 - We present an investigation of the dynamics of a clamped-clamped microbeam excited electrostatically near its third mode. To maximize the response at the third mode, a partial electrode configuration is utilized. A multi-mode Galerkin method is used to develop a reduced order model (ROM) of the beam. A shooting method to find the periodic motion is utilized to generate frequency response curves. The curves show hardenining behavior and dynamic pull-in. We show that the dynamic amplitude of the partial configuration is higher than that of a full electrode configuration. These results are promising for the use of higher-order modes for mass detection and for ultra sensitive resonant sensors.

AB - We present an investigation of the dynamics of a clamped-clamped microbeam excited electrostatically near its third mode. To maximize the response at the third mode, a partial electrode configuration is utilized. A multi-mode Galerkin method is used to develop a reduced order model (ROM) of the beam. A shooting method to find the periodic motion is utilized to generate frequency response curves. The curves show hardenining behavior and dynamic pull-in. We show that the dynamic amplitude of the partial configuration is higher than that of a full electrode configuration. These results are promising for the use of higher-order modes for mass detection and for ultra sensitive resonant sensors.

UR - http://hdl.handle.net/10754/593273

UR - http://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?doi=10.1115/DETC2014-34923

U2 - 10.1115/DETC2014-34923

DO - 10.1115/DETC2014-34923

M3 - Conference contribution

SN - 9780791846391

BT - Volume 6: 10th International Conference on Multibody Systems, Nonlinear Dynamics, and Control

PB - ASME International

ER -

Investigation of the Dynamics of a Clamped-Clamped Microbeam Near the Third Mode Using a Partial Electrode

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