Investigation of multi-walled carbon nanotube-based structures for high density integrated capacitors

Yehia Massoud, Arthur Nieuwoudt

Research output: Contribution to journalArticlepeer-review


The development of high density integrated capacitors is crucial for the implementation of high performance mixed-signal integrated circuits in VLSI applications. In this paper, we investigate three possible high density integrated capacitor configurations based on multi-walled carbon nanotubes (MWCNT). We develop an RLC model for the MWCNT-based capacitor configurations and examine the design trade-off between capacitance per area and losses due to parasitic resistance and inductance. The results indicate that the proposed MWCNT-based capacitor configurations can potentially offer orders of magnitude larger capacitance per area and comparable quality factors to traditional metal-based integrated capacitors, which will enable more compact mixed-signal systems with greater performance. This study highlights the performance and capacitive density limits of MWCNT-based capacitors. © 2008 Inderscience Enterprises Ltd.
Original languageEnglish (US)
Pages (from-to)96-107
Number of pages12
JournalInternational Journal of Nanoparticles
Issue number2
StatePublished - Jan 1 2008
Externally publishedYes

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