Interface lithography: A hybrid lithographic approach for the fabrication of patterns embedded in three-dimensional structures

Engineering

• Lithography 100%
• Dimensional Structure 100%
• Microstructure 50%
• Microfluidic Channel 50%
• Crystal Structure 50%
• Electron Optical Lithography 50%
• Demonstrates 50%
• Waveguide 50%

Keyphrases

• Flyover 100%
• Three-dimensional Photonic Crystals 100%
• Embedded Waveguide 100%
• Process Scheme 100%

Material Science

• Lithography 100%
• Electron Optical Lithography 50%
• Photonic Crystal 50%
• Waveguide 50%
• Crystal Structure 50%