Integration of high-k gate stack systems into planar CMOS process flows

H. R. Huff, A. Agarwal, Youngjin Kim, L. Perrymore, D. Riley, J. Barnett, C. Sparks, M. Freiler, G. Gebara, B. Bowers, Peng Chen, P. Lysaght, B. Nguyen, S. Lim, G. Bersuker, P. Zeitzoff, Graham Brown, C. Young, B. Foran, F. ShaapurA. Hou, C. Lim, Husam Niman Alshareef, S. Borthakur, D. J. Derro, R. Bergmann, L. A. Larson, M. I. Gardner, J. Gutt, R. W. Murto, K. Torres

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

19 Scopus citations

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