Integration of carbon nanotubes to C-MEMS for on-chip supercapacitors

Wei Chen; Majid Beidaghi; Varun Penmatsa; Kevin Bechtold; Latha Kumari; W. Z. Li; Chunlei Wang

doi:10.1109/TNANO.2010.2049500

Integration of carbon nanotubes to C-MEMS for on-chip supercapacitors

Wei Chen^*, Majid Beidaghi, Varun Penmatsa, Kevin Bechtold, Latha Kumari, W. Z. Li, Chunlei Wang

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

73 Scopus citations

Abstract

Carbon nanotubes (CNTs)/carbon microelectromechanical systems (C-MEMS) composites were fabricated as electrode materials for on-chip supercapacitors. By using photolithography and pyrolysis process, 3-D C-MEMS architectures were prepared. The iron catalyst particles were conformally coated on the C-MEMS by electrostatic spray deposition (ESD) and CNTs were synthesized on the surfaces of C-MEMS by catalytic CVD method. The CNT/C-MEMS composites exhibited higher specific capacitance than C-MEMS. Furthermore, the composites with more homogeneous CNTs showed better capacitance. After treatment of oxygen plasma, the specific capacitance of the composite increased due to the contribution of oxygen functional groups.

Original language	English (US)
Article number	5458084
Pages (from-to)	734-740
Number of pages	7
Journal	IEEE Transactions on Nanotechnology
Volume	9
Issue number	6
DOIs	https://doi.org/10.1109/TNANO.2010.2049500
State	Published - Nov 2010

Keywords

Carbon microelectromechanical systems (C-MEMS)
carbon nanotubes (CNTs)
on-chip supercapacitors

ASJC Scopus subject areas

Computer Science Applications
Electrical and Electronic Engineering

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10.1109/TNANO.2010.2049500

Cite this

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abstract = "Carbon nanotubes (CNTs)/carbon microelectromechanical systems (C-MEMS) composites were fabricated as electrode materials for on-chip supercapacitors. By using photolithography and pyrolysis process, 3-D C-MEMS architectures were prepared. The iron catalyst particles were conformally coated on the C-MEMS by electrostatic spray deposition (ESD) and CNTs were synthesized on the surfaces of C-MEMS by catalytic CVD method. The CNT/C-MEMS composites exhibited higher specific capacitance than C-MEMS. Furthermore, the composites with more homogeneous CNTs showed better capacitance. After treatment of oxygen plasma, the specific capacitance of the composite increased due to the contribution of oxygen functional groups.",

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AU - Chen, Wei

AU - Beidaghi, Majid

AU - Penmatsa, Varun

AU - Bechtold, Kevin

AU - Kumari, Latha

AU - Li, W. Z.

AU - Wang, Chunlei

PY - 2010/11

Y1 - 2010/11

N2 - Carbon nanotubes (CNTs)/carbon microelectromechanical systems (C-MEMS) composites were fabricated as electrode materials for on-chip supercapacitors. By using photolithography and pyrolysis process, 3-D C-MEMS architectures were prepared. The iron catalyst particles were conformally coated on the C-MEMS by electrostatic spray deposition (ESD) and CNTs were synthesized on the surfaces of C-MEMS by catalytic CVD method. The CNT/C-MEMS composites exhibited higher specific capacitance than C-MEMS. Furthermore, the composites with more homogeneous CNTs showed better capacitance. After treatment of oxygen plasma, the specific capacitance of the composite increased due to the contribution of oxygen functional groups.

AB - Carbon nanotubes (CNTs)/carbon microelectromechanical systems (C-MEMS) composites were fabricated as electrode materials for on-chip supercapacitors. By using photolithography and pyrolysis process, 3-D C-MEMS architectures were prepared. The iron catalyst particles were conformally coated on the C-MEMS by electrostatic spray deposition (ESD) and CNTs were synthesized on the surfaces of C-MEMS by catalytic CVD method. The CNT/C-MEMS composites exhibited higher specific capacitance than C-MEMS. Furthermore, the composites with more homogeneous CNTs showed better capacitance. After treatment of oxygen plasma, the specific capacitance of the composite increased due to the contribution of oxygen functional groups.

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Integration of carbon nanotubes to C-MEMS for on-chip supercapacitors

Abstract

Keywords

ASJC Scopus subject areas

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