Integration of carbon nanotubes to C-MEMS for on-chip supercapacitors

Wei Chen*, Majid Beidaghi, Varun Penmatsa, Kevin Bechtold, Latha Kumari, W. Z. Li, Chunlei Wang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

71 Scopus citations


Carbon nanotubes (CNTs)/carbon microelectromechanical systems (C-MEMS) composites were fabricated as electrode materials for on-chip supercapacitors. By using photolithography and pyrolysis process, 3-D C-MEMS architectures were prepared. The iron catalyst particles were conformally coated on the C-MEMS by electrostatic spray deposition (ESD) and CNTs were synthesized on the surfaces of C-MEMS by catalytic CVD method. The CNT/C-MEMS composites exhibited higher specific capacitance than C-MEMS. Furthermore, the composites with more homogeneous CNTs showed better capacitance. After treatment of oxygen plasma, the specific capacitance of the composite increased due to the contribution of oxygen functional groups.

Original languageEnglish (US)
Article number5458084
Pages (from-to)734-740
Number of pages7
JournalIEEE Transactions on Nanotechnology
Issue number6
StatePublished - Nov 2010


  • Carbon microelectromechanical systems (C-MEMS)
  • carbon nanotubes (CNTs)
  • on-chip supercapacitors

ASJC Scopus subject areas

  • Computer Science Applications
  • Electrical and Electronic Engineering


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