Integration of Capacitive Micromachined Ultrasound Transducers to Microfluidic Devices

Darius Viržonis; Rimantas Kodzius; Galius Vanagas

Integration of Capacitive Micromachined Ultrasound Transducers to Microfluidic Devices

Darius Viržonis, Rimantas Kodzius, Galius Vanagas

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Abstract

The design and manufacturing flexibility of capacitive micromachined ultrasound transducers (CMUT) makes them attractive option for integration with microfluidic devices both for sensing and fluid manipulation. CMUT concept is introduced here by presentin

Original language	English (US)
Title of host publication	Microfluidics: Control, Manipulation and Behavioral Applications
Publisher	Nova Science Publishers
ISBN (Print)	978-1-62417-345-5
State	Published - Oct 22 2013

Bibliographical note

KAUST Repository Item: Exported on 2020-10-01
Acknowledgements: Seed Fund Award "Envirola" made by King Abdullah University of Science and Technology (KAUST); grant (No. MIP-059/2012) from the Research Council of Lithuania

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https://repository.kaust.edu.sa/bitstream/10754/303786/1/Integration%20of%20Capacitive%20Micromachined%20Ultrasound%20Transducers%20to%20Microfluidic%20Devices.pdf

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Viržonis, D., Kodzius, R., & Vanagas, G. (2013). Integration of Capacitive Micromachined Ultrasound Transducers to Microfluidic Devices. In Microfluidics: Control, Manipulation and Behavioral Applications Nova Science Publishers. https://repository.kaust.edu.sa/bitstream/10754/303786/1/Integration%20of%20Capacitive%20Micromachined%20Ultrasound%20Transducers%20to%20Microfluidic%20Devices.pdf

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author = "Darius Vir{\v z}onis and Rimantas Kodzius and Galius Vanagas",

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Viržonis, D, Kodzius, R & Vanagas, G 2013, Integration of Capacitive Micromachined Ultrasound Transducers to Microfluidic Devices. in Microfluidics: Control, Manipulation and Behavioral Applications. Nova Science Publishers. <https://repository.kaust.edu.sa/bitstream/10754/303786/1/Integration%20of%20Capacitive%20Micromachined%20Ultrasound%20Transducers%20to%20Microfluidic%20Devices.pdf>

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AU - Viržonis, Darius

AU - Kodzius, Rimantas

AU - Vanagas, Galius

N1 - KAUST Repository Item: Exported on 2020-10-01 Acknowledgements: Seed Fund Award "Envirola" made by King Abdullah University of Science and Technology (KAUST); grant (No. MIP-059/2012) from the Research Council of Lithuania

PY - 2013/10/22

Y1 - 2013/10/22

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UR - http://hdl.handle.net/10754/303786

UR - https://www.novapublishers.com/catalog/product_info.php?products_id=41704

M3 - Chapter

SN - 978-1-62417-345-5

BT - Microfluidics: Control, Manipulation and Behavioral Applications

PB - Nova Science Publishers

ER -

Integration of Capacitive Micromachined Ultrasound Transducers to Microfluidic Devices

Abstract

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