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Inductively coupled plasma etching of orthorhombic gallium oxide films grown by mist chemical vapor deposition
Yara Banda*, Seong Ho Cho, Yanqing Jia, Si Young Bae, Tien Khee Ng, Boon S. Ooi
*Corresponding author for this work
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review