Hysteresis spring single digital input bistable mechanism

Ian G. Foulds; M. Parameswaran

doi:10.1109/ICMENS.2005.5

Hysteresis spring single digital input bistable mechanism

Ian G. Foulds^*, M. Parameswaran

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Abstract

This paper presents the first reported microfabricated single digital input bistable MEMS mechanism. The bistable mechanism is an important building block for many MEMS. Applications of bistable mechanisms include optical switches, microrelays and motor transmissions. Current literature contains examples of dual digital input and single analog input bistable mechanisms; however, no single digital input bistable mechanisms have yet been reported. This work develops the hysteresis spring as an enabling mechanism to allow the creation of the first reported single digital input bistable mechanism. The functionality of the hysteresis spring single digital input bistable mechanism is described and an analytical model is developed. The analytical model is shown to agree with experimental results. The proof of concept design has been fabricated and the prescribed functionality has been shown experimentally.

Original language	English (US)
Title of host publication	Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005
Pages	455-458
Number of pages	4
DOIs	https://doi.org/10.1109/ICMENS.2005.5
State	Published - 2005
Externally published	Yes
Event	2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005 - Banff, Alberta, Canada Duration: Jul 24 2006 → Jul 27 2006

Other

Other	2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005
Country/Territory	Canada
City	Banff, Alberta
Period	07/24/06 → 07/27/06

Keywords

Bistable
MEMS
PolyMUMPS
Single Input
Surface Micromachining Technology

ASJC Scopus subject areas

Engineering(all)

Access to Document

10.1109/ICMENS.2005.5

Cite this

@inproceedings{14574802d97347a5b70e5cb6682f73ec,

title = "Hysteresis spring single digital input bistable mechanism",

abstract = "This paper presents the first reported microfabricated single digital input bistable MEMS mechanism. The bistable mechanism is an important building block for many MEMS. Applications of bistable mechanisms include optical switches, microrelays and motor transmissions. Current literature contains examples of dual digital input and single analog input bistable mechanisms; however, no single digital input bistable mechanisms have yet been reported. This work develops the hysteresis spring as an enabling mechanism to allow the creation of the first reported single digital input bistable mechanism. The functionality of the hysteresis spring single digital input bistable mechanism is described and an analytical model is developed. The analytical model is shown to agree with experimental results. The proof of concept design has been fabricated and the prescribed functionality has been shown experimentally.",

keywords = "Bistable, MEMS, PolyMUMPS, Single Input, Surface Micromachining Technology",

author = "Foulds, {Ian G.} and M. Parameswaran",

year = "2005",

doi = "10.1109/ICMENS.2005.5",

language = "English (US)",

isbn = "0769523986",

pages = "455--458",

booktitle = "Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005",

note = "2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005 ; Conference date: 24-07-2006 Through 27-07-2006",

}

TY - GEN

T1 - Hysteresis spring single digital input bistable mechanism

AU - Foulds, Ian G.

AU - Parameswaran, M.

PY - 2005

Y1 - 2005

N2 - This paper presents the first reported microfabricated single digital input bistable MEMS mechanism. The bistable mechanism is an important building block for many MEMS. Applications of bistable mechanisms include optical switches, microrelays and motor transmissions. Current literature contains examples of dual digital input and single analog input bistable mechanisms; however, no single digital input bistable mechanisms have yet been reported. This work develops the hysteresis spring as an enabling mechanism to allow the creation of the first reported single digital input bistable mechanism. The functionality of the hysteresis spring single digital input bistable mechanism is described and an analytical model is developed. The analytical model is shown to agree with experimental results. The proof of concept design has been fabricated and the prescribed functionality has been shown experimentally.

AB - This paper presents the first reported microfabricated single digital input bistable MEMS mechanism. The bistable mechanism is an important building block for many MEMS. Applications of bistable mechanisms include optical switches, microrelays and motor transmissions. Current literature contains examples of dual digital input and single analog input bistable mechanisms; however, no single digital input bistable mechanisms have yet been reported. This work develops the hysteresis spring as an enabling mechanism to allow the creation of the first reported single digital input bistable mechanism. The functionality of the hysteresis spring single digital input bistable mechanism is described and an analytical model is developed. The analytical model is shown to agree with experimental results. The proof of concept design has been fabricated and the prescribed functionality has been shown experimentally.

KW - Bistable

KW - MEMS

KW - PolyMUMPS

KW - Single Input

KW - Surface Micromachining Technology

UR - http://www.scopus.com/inward/record.url?scp=33749043960&partnerID=8YFLogxK

U2 - 10.1109/ICMENS.2005.5

DO - 10.1109/ICMENS.2005.5

M3 - Conference contribution

AN - SCOPUS:33749043960

SN - 0769523986

SN - 9780769523989

SP - 455

EP - 458

BT - Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005

T2 - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005

Y2 - 24 July 2006 through 27 July 2006

ER -

Hysteresis spring single digital input bistable mechanism

Abstract

Other

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this