Stackable 3DFETs such as FinFET using hybrid Si/MoS2 channels were developed using a fully CMOS-compatible process. Adding several molecular layers (3-16 layers) of the transition-metal dichalcogenide (TMD), MoS2 to Si fin and nanowire resulted in improved (+25%) Ion,n of the FinFET and nanowire FET (NWFET). The PFETs also operated effectively and the N/P device Vth are low and matched perfectly. The proposed heterogeneous Si/TMD 3DFETs can be useful in future electronics. © 2014 IEEE.
|Original language||English (US)|
|Title of host publication||2014 IEEE International Electron Devices Meeting|
|Publisher||Institute of Electrical and Electronics Engineers (IEEE)|
|Number of pages||1|
|State||Published - Dec 2014|