Highly Tunable Narrow Bandpass MEMS Filter

Md Abdullah Al Hafiz; Lakshmoji Kosuru; Amal Hajjaj; Mohammad I. Younis

doi:10.1109/TED.2017.2716949

Highly Tunable Narrow Bandpass MEMS Filter

Md Abdullah Al Hafiz, Lakshmoji Kosuru, Amal Hajjaj, Mohammad I. Younis

Research output: Contribution to journal › Article › peer-review

26 Scopus citations

Abstract

We demonstrate a proof-of-concept highly tunable narrow bandpass filter based on electrothermally and electrostatically actuated microelectromechanical-system (MEMS) resonators. The device consists of two mechanically uncoupled clamped-clamped arch resonators, designed such that their resonance frequencies are independently tuned to obtain the desired narrow passband. Through the electrothermal and electrostatic actuation, the stiffness of the structures is highly tunable. We experimentally demonstrate significant percentage tuning (~125%) of the filter center frequency by varying the applied electrothermal voltages to the resonating structures, while maintaining a narrow passband of 550 ± 50 Hz, a stopband rejection of >17 dB, and a passband ripple ≤ 2.5 dB. An analytical model based on the Euler-Bernoulli beam theory is used to confirm the behavior of the filter, and the origin of the high tunability using electrothermal actuation is discussed.

Original language	English (US)
Pages (from-to)	3392-3398
Number of pages	7
Journal	IEEE Transactions on Electron Devices
Volume	64
Issue number	8
DOIs	https://doi.org/10.1109/TED.2017.2716949
State	Published - Jul 7 2017

Bibliographical note

KAUST Repository Item: Exported on 2020-10-01
Acknowledgements: This work was supported by the King Abdullah University of Science and Technology.

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10.1109/TED.2017.2716949

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title = "Highly Tunable Narrow Bandpass MEMS Filter",

abstract = "We demonstrate a proof-of-concept highly tunable narrow bandpass filter based on electrothermally and electrostatically actuated microelectromechanical-system (MEMS) resonators. The device consists of two mechanically uncoupled clamped-clamped arch resonators, designed such that their resonance frequencies are independently tuned to obtain the desired narrow passband. Through the electrothermal and electrostatic actuation, the stiffness of the structures is highly tunable. We experimentally demonstrate significant percentage tuning (~125%) of the filter center frequency by varying the applied electrothermal voltages to the resonating structures, while maintaining a narrow passband of 550 ± 50 Hz, a stopband rejection of >17 dB, and a passband ripple ≤ 2.5 dB. An analytical model based on the Euler-Bernoulli beam theory is used to confirm the behavior of the filter, and the origin of the high tunability using electrothermal actuation is discussed.",

author = "Hafiz, {Md Abdullah Al} and Lakshmoji Kosuru and Amal Hajjaj and Younis, {Mohammad I.}",

note = "KAUST Repository Item: Exported on 2020-10-01 Acknowledgements: This work was supported by the King Abdullah University of Science and Technology.",

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doi = "10.1109/TED.2017.2716949",

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T1 - Highly Tunable Narrow Bandpass MEMS Filter

AU - Hafiz, Md Abdullah Al

AU - Kosuru, Lakshmoji

AU - Hajjaj, Amal

AU - Younis, Mohammad I.

N1 - KAUST Repository Item: Exported on 2020-10-01 Acknowledgements: This work was supported by the King Abdullah University of Science and Technology.

PY - 2017/7/7

Y1 - 2017/7/7

N2 - We demonstrate a proof-of-concept highly tunable narrow bandpass filter based on electrothermally and electrostatically actuated microelectromechanical-system (MEMS) resonators. The device consists of two mechanically uncoupled clamped-clamped arch resonators, designed such that their resonance frequencies are independently tuned to obtain the desired narrow passband. Through the electrothermal and electrostatic actuation, the stiffness of the structures is highly tunable. We experimentally demonstrate significant percentage tuning (~125%) of the filter center frequency by varying the applied electrothermal voltages to the resonating structures, while maintaining a narrow passband of 550 ± 50 Hz, a stopband rejection of >17 dB, and a passband ripple ≤ 2.5 dB. An analytical model based on the Euler-Bernoulli beam theory is used to confirm the behavior of the filter, and the origin of the high tunability using electrothermal actuation is discussed.

AB - We demonstrate a proof-of-concept highly tunable narrow bandpass filter based on electrothermally and electrostatically actuated microelectromechanical-system (MEMS) resonators. The device consists of two mechanically uncoupled clamped-clamped arch resonators, designed such that their resonance frequencies are independently tuned to obtain the desired narrow passband. Through the electrothermal and electrostatic actuation, the stiffness of the structures is highly tunable. We experimentally demonstrate significant percentage tuning (~125%) of the filter center frequency by varying the applied electrothermal voltages to the resonating structures, while maintaining a narrow passband of 550 ± 50 Hz, a stopband rejection of >17 dB, and a passband ripple ≤ 2.5 dB. An analytical model based on the Euler-Bernoulli beam theory is used to confirm the behavior of the filter, and the origin of the high tunability using electrothermal actuation is discussed.

UR - http://hdl.handle.net/10754/625667

UR - http://ieeexplore.ieee.org/document/7971946/

UR - http://www.scopus.com/inward/record.url?scp=85022190516&partnerID=8YFLogxK

U2 - 10.1109/TED.2017.2716949

DO - 10.1109/TED.2017.2716949

M3 - Article

SN - 0018-9383

VL - 64

SP - 3392

EP - 3398

JO - IEEE Transactions on Electron Devices

JF - IEEE Transactions on Electron Devices

IS - 8

ER -

Highly Tunable Narrow Bandpass MEMS Filter

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