Abstract
There is a need for reliable and accurate air quality monitoring systems in order to secure human health from the air pollutants such as nitrogen dioxide (NO2). The development of low-cost and modern technology-compatible sensing systems is essential. In this work, a highly sensitive and selective indium gallium zinc oxide (IGZO) thin film transistor has been used to design an efficient and wireless NO2 sensing system. The sensing system uses the IGZO thin film transistor (TFT) as a current source for the current-starved ring oscillator (CSRO) where exposed NO2 concentration determines the oscillation frequency. The presented NO2 gas sensing system exhibited excellent sensitivity of 5.39 MHz/ppm with the lowest detection limit (LOD) of 50 ppb at room temperature. To the best of the authors' knowledge, the achieved sensitivity is the best-reported performance for frequency-based NO2 sensors. The sinusoidal output of the sensor obviates the need for costly peripheral signal conditioning circuits and allows direct integration with wireless systems. The 13.56 MHz RFID antenna connected to the output of the sensor is used to show wireless sensing compatibility and highlights the excellent candidacy of the proposed work for the growing Internet of Things (IoT) and untethered sensor applications.
Original language | English (US) |
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Pages (from-to) | 15667-15674 |
Number of pages | 8 |
Journal | IEEE Sensors Journal |
Volume | 23 |
Issue number | 14 |
DOIs | |
State | Published - Jul 15 2023 |
Bibliographical note
Funding Information:This work was supported by the King Abdullah University of Science and Technology (KAUST) Baseline Funding
Publisher Copyright:
© 2001-2012 IEEE.
Keywords
- Air quality monitoring
- indium gallium zinc oxide thin film transistor (IGZO TFT)
- Internet of Things (IoT)
- nitrogen dioxide (NO) sensor
- oscillators
- sensing systems
- wireless gas sensors
ASJC Scopus subject areas
- Instrumentation
- Electrical and Electronic Engineering