TY - JOUR
T1 - Highly catalytic hydrogen sensing properties of the nano percolated Pd/Mg/Ti nanoparticles layers decorated on Si substrate
AU - Rahaman, Md Habibur
AU - Yaqoob, Usman
AU - Uddin, Md Mayen
AU - Kim, Hyeon Cheol
N1 - KAUST Repository Item: Exported on 2021-03-05
Acknowledgements: This work was supported by the 2019 Research Fund of University of Ulsan.
PY - 2021/2/15
Y1 - 2021/2/15
N2 - Highly catalytic hydrogen sensing properties of the nano percolated Pd/Mg/Ti nanoparticles layers on Si substrate have been investigated. The catalytic nanomaterials (Pd/Mg/Ti) were deposited on the Si substrate by using a radio frequency (RF) magnetron sputtering system. An optimized percolated sensing surface was introduced by varying the deposition conditions of the Pd/Mg/Ti nanoparticles (NPs) layers. After preparing the sensing device, resistance was observed to increase at the presence of hydrogen gas (H2) and a completely reversible process was recorded for its absence. Besides, the sensor shows significant results such as a broader sensing range (1,000 ~ 40,000 ppm), a fast response time of ~1 s for a 10,000 ppm (1 vol%) H2 concentration at 160 °C temperature. A highly stable (up to ~50 days) sensing performance and good selectivity were also observed for the sensor. This Pd/Mg/Ti NPs layers on Si substrate have lucrative advantages as an H2 sensor for fast response and highly stable sensing performance.
AB - Highly catalytic hydrogen sensing properties of the nano percolated Pd/Mg/Ti nanoparticles layers on Si substrate have been investigated. The catalytic nanomaterials (Pd/Mg/Ti) were deposited on the Si substrate by using a radio frequency (RF) magnetron sputtering system. An optimized percolated sensing surface was introduced by varying the deposition conditions of the Pd/Mg/Ti nanoparticles (NPs) layers. After preparing the sensing device, resistance was observed to increase at the presence of hydrogen gas (H2) and a completely reversible process was recorded for its absence. Besides, the sensor shows significant results such as a broader sensing range (1,000 ~ 40,000 ppm), a fast response time of ~1 s for a 10,000 ppm (1 vol%) H2 concentration at 160 °C temperature. A highly stable (up to ~50 days) sensing performance and good selectivity were also observed for the sensor. This Pd/Mg/Ti NPs layers on Si substrate have lucrative advantages as an H2 sensor for fast response and highly stable sensing performance.
UR - http://hdl.handle.net/10754/667857
UR - https://linkinghub.elsevier.com/retrieve/pii/S0169433221002798
UR - http://www.scopus.com/inward/record.url?scp=85101423651&partnerID=8YFLogxK
U2 - 10.1016/j.apsusc.2021.149203
DO - 10.1016/j.apsusc.2021.149203
M3 - Article
SN - 0169-4332
VL - 549
SP - 149203
JO - Applied Surface Science
JF - Applied Surface Science
ER -