Higher order modes excitation of electrostatically actuated clamped–clamped microbeams: experimental and analytical investigation

Physics

• Amplitudes 40%
• Chromium 20%
• Electrodes 100%
• Galerkin Method 20%
• Microbeam 40%
• Nickel 20%
• Resonator 40%
• Responses 40%
• Shapes 20%
• Vibration 20%

Engineering

• Amplitudes 40%
• Analytical Model 20%
• Beam Model 20%
• Demonstrates 40%
• Good Agreement 20%
• Loading Condition 40%
• Mode of Vibration 40%
• Resonance Mode 20%
• Simulation Result 20%
• Sweep Frequency 20%
• Zeros 20%

Chemistry

• Configuration 20%
• Device 40%
• Polyimide Macromolecule 20%
• Shape 20%
• Vibration 20%