High-throughput near-field optical nanoprocessing of solution-deposited nanoparticles

Heng Pan, David J. Hwang, Seung H. Ko, Tabitha A. Clem, Jean M.J. Fréchet, Dieter Bäuerle, Costas P. Grigoropoulos

    Research output: Contribution to journalArticlepeer-review

    62 Scopus citations


    The application of nanoscale electrical and biological devices will benefit from the development of nanomanufacturing technologies that are highthroughput, low-cost, and flexible. Utilizing nanomaterials as building blocks and organizing them in a rational way constitutes an attractive approach towards this goal and has been pursued for the past few years. The optical near-field nanoprocessing of nanoparticles for high-throughput nanomanufacturing is reported. The method utilizes fluidically assembled microspheres as a near-field optical confinement structure array for laserassisted nanosintering and nanoablation of nanoparticles. By taking advantage of the low processing temperature and reduced thermal diffusion in the nanoparticle film, a minimum feature size down to ≈i100nm is realized. In addition, smaller features (50nm) are obtained by furnace annealing of laser-sintered nanodots at 400 °C. The electrical conductivity of sintered nanolines is also studied. Using nanoline electrodes separated by a submicrometer gap, organic field-effect transistors are subsequently fabricated with oxygen-stable semiconducting polymer.

    Original languageEnglish (US)
    Pages (from-to)1812-1821
    Number of pages10
    Issue number16
    StatePublished - Aug 16 2010

    Bibliographical note

    KAUST Repository Item: Exported on 2020-10-01
    Acknowledgements: The authors acknowledge support by the King Abdullah University of Science and Technology (KAUST). C.P.G. and D.J.H. also acknowledge support by DARPA/MTO under the SPAWAR grant N66001-08-1-2041. Any opinions, findings, and conclusions expressed in this publication are those of the authors and do not necessarily reflect the views of DARPA/MTO.
    This publication acknowledges KAUST support, but has no KAUST affiliated authors.


    • Lasers
    • Nanoparticles
    • Organic field-effect transistors
    • Patterning
    • Processing

    ASJC Scopus subject areas

    • General Chemistry
    • Engineering (miscellaneous)
    • Biotechnology
    • General Materials Science
    • Biomaterials


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