High-Temperature Annealing Effects on Atomically Thin Tungsten Diselenide Field-Effect Transistor

Muhammad Atif Khan, Muhammad Qasim Mehmood, Yehia Massoud*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Scopus citations


Two-dimensional (2D) material-based devices are expected to operate under high temperatures induced by Joule heating and environmental conditions when integrated into compact integrated circuits for practical applications. However, the behavior of these materials at high operating temperatures is obscure as most studies emphasize only room temperature or low-temperature operation. Here, the high-temperature electrical response of the tungsten diselenide (WSe2) field-effect transistor was studied. It is revealed that 350 K is the optimal annealing temperature for the WSe2 transistor, and annealing at this temperature improves on-current, field-effect mobility and on/off ratio around three times. Annealing beyond this temperature (360 K to 670 K) adversely affects the device performance attributed to the partial oxidation of WSe2 at higher temperatures. An increase in hysteresis also confirms the formation of new traps as the device is annealed beyond 350 K. These findings explicate the thermal stability of WSe2 and can help design 2D materials-based durable devices for high-temperature practical applications.

Original languageEnglish (US)
Article number8119
JournalApplied Sciences (Switzerland)
Issue number16
StatePublished - Aug 2022

Bibliographical note

Funding Information:
The authors would like to acknowledge the research funding to the KAUST Innovative Technologies Laboratories (ITL) from King Abdullah University of Science and Technology (KAUST).

Publisher Copyright:
© 2022 by the authors.


  • 2D materials
  • annealing
  • field-effect transistor
  • mobility
  • thermal stability
  • WSe

ASJC Scopus subject areas

  • General Materials Science
  • Instrumentation
  • General Engineering
  • Process Chemistry and Technology
  • Computer Science Applications
  • Fluid Flow and Transfer Processes


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