High spatial resolution strain measurement of deep sub-micron semiconductor devices using CBED

Suey Li Toh*, K. Li, C. H. Ang, E. Er, S. Redkar, K. P. Loh, C. B. Boothroyd, L. Chan

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

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Engineering & Materials Science