High spatial resolution quantum well intermixing process in GaInAs/GaInAsP laser structures

T. K. Ong, B. S. Ooi, Y. L. Lam, Y. C. Chan, M. K. Rao

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Quantum well intermixing (QWI) has been developed in III-V semiconductors to modify the quantum well (QW) profile in selected regions to enhance the blue shift of the optical absorption edge after growth. Laser induced disordering (LID) is one of the QWI techniques, which is impurity free and offers the possibility of direct writing capability. Pulsed-photoabsorption induced disordering (P-PAID) is a LID technique whereby the absorption of high-energy pulses from Nd:YAG laser pulses causes bond breaking and lattice disruption leading to an increased density of point defects. Subsequent high temperature annealing results in diffusion of the point defects and enhances the QWI rate. The laser pulses used were of similar duration to the thermal time constant of InP in order to minimize the effects of lateral diffusion. So far, photoluminescence (PL) spectroscopy measurements have demonstrated that the spatial resolution of the process is better than 25 μm. Time resolved photoluminescence measurements of the same sample have indicated a spatial resolution better than 20 μm. Micro-Raman spectra were taken in a backscattering configuration in an increment of 2.5 μm from the gold masked region.

Original languageEnglish (US)
Title of host publicationCLEO/Pacific Rim 1999 - Pacific Rim Conference on Lasers and Electro-Optics
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages193-194
Number of pages2
ISBN (Electronic)0780356616, 9780780356610
DOIs
StatePublished - 1999
Externally publishedYes
Event1999 Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 1999 - Seoul, Korea, Republic of
Duration: Aug 30 1999Sep 3 1999

Publication series

NameCLEO/Pacific Rim 1999 - Pacific Rim Conference on Lasers and Electro-Optics
Volume2

Other

Other1999 Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 1999
Country/TerritoryKorea, Republic of
CitySeoul
Period08/30/9909/3/99

Bibliographical note

Publisher Copyright:
© 1999 IEEE.

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Computer Networks and Communications
  • General Physics and Astronomy

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