High-resolution complex structures for two-dimensional photonic crystals realized by x-ray diffraction lithography

L. Businaro*, F. Romanato, P. Candeloro, E. Di Fabrizio, M. Patrini, M. Galli, C. Andreani, A. Passaseo, M. De Vittorio

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

9 Scopus citations
Original languageEnglish (US)
Pages (from-to)748-753
Number of pages6
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Issue number2
StatePublished - 2003
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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