Hard x-ray phase zone plate fabricated by lithographic techniques

B. Lai; W. B. Yun; D. Legnini; Y. Xiao; J. Chrzas; P. J. Viccaro; V. White; S. Bajikar; D. Denton; F. Cerrina; E. Di Fabrizio; M. Gentili; L. Grella; M. Baciocchi

doi:10.1063/1.108400

Hard x-ray phase zone plate fabricated by lithographic techniques

B. Lai^*, W. B. Yun, D. Legnini, Y. Xiao, J. Chrzas, P. J. Viccaro, V. White, S. Bajikar, D. Denton, F. Cerrina, E. Di Fabrizio, M. Gentili, L. Grella, M. Baciocchi

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

116 Scopus citations

Abstract

A Fresnel phase zone plate with an unprecedented focusing efficiency of 33% was fabricated using an x-ray lithographic technique and was tested using synchrotron x rays. Contributions by the zeroth-order x ray to the focus were minimal. Spatial resolution in the micrometer range was achieved. The measured spot size was dominated by geometric demagnification of the source. It should be possible to obtain submicrometer resolution by aperturing the source. Experimental results of focusing efficiency measurements, intensity distribution at the focal plane, and spatial resolution tests are reported.

Original language	English (US)
Pages (from-to)	1877-1879
Number of pages	3
Journal	Applied Physics Letters
Volume	61
Issue number	16
DOIs	https://doi.org/10.1063/1.108400
State	Published - 1992
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.108400

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@article{4dd9830b5d0143899d5b5deaf1aefa1c,

title = "Hard x-ray phase zone plate fabricated by lithographic techniques",

abstract = "A Fresnel phase zone plate with an unprecedented focusing efficiency of 33% was fabricated using an x-ray lithographic technique and was tested using synchrotron x rays. Contributions by the zeroth-order x ray to the focus were minimal. Spatial resolution in the micrometer range was achieved. The measured spot size was dominated by geometric demagnification of the source. It should be possible to obtain submicrometer resolution by aperturing the source. Experimental results of focusing efficiency measurements, intensity distribution at the focal plane, and spatial resolution tests are reported.",

author = "B. Lai and Yun, {W. B.} and D. Legnini and Y. Xiao and J. Chrzas and Viccaro, {P. J.} and V. White and S. Bajikar and D. Denton and F. Cerrina and {Di Fabrizio}, E. and M. Gentili and L. Grella and M. Baciocchi",

year = "1992",

doi = "10.1063/1.108400",

language = "English (US)",

volume = "61",

pages = "1877--1879",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "AMER INST PHYSICS",

number = "16",

}

TY - JOUR

T1 - Hard x-ray phase zone plate fabricated by lithographic techniques

AU - Lai, B.

AU - Yun, W. B.

AU - Legnini, D.

AU - Xiao, Y.

AU - Chrzas, J.

AU - Viccaro, P. J.

AU - White, V.

AU - Bajikar, S.

AU - Denton, D.

AU - Cerrina, F.

AU - Di Fabrizio, E.

AU - Gentili, M.

AU - Grella, L.

AU - Baciocchi, M.

PY - 1992

Y1 - 1992

N2 - A Fresnel phase zone plate with an unprecedented focusing efficiency of 33% was fabricated using an x-ray lithographic technique and was tested using synchrotron x rays. Contributions by the zeroth-order x ray to the focus were minimal. Spatial resolution in the micrometer range was achieved. The measured spot size was dominated by geometric demagnification of the source. It should be possible to obtain submicrometer resolution by aperturing the source. Experimental results of focusing efficiency measurements, intensity distribution at the focal plane, and spatial resolution tests are reported.

AB - A Fresnel phase zone plate with an unprecedented focusing efficiency of 33% was fabricated using an x-ray lithographic technique and was tested using synchrotron x rays. Contributions by the zeroth-order x ray to the focus were minimal. Spatial resolution in the micrometer range was achieved. The measured spot size was dominated by geometric demagnification of the source. It should be possible to obtain submicrometer resolution by aperturing the source. Experimental results of focusing efficiency measurements, intensity distribution at the focal plane, and spatial resolution tests are reported.

UR - http://www.scopus.com/inward/record.url?scp=0000907665&partnerID=8YFLogxK

U2 - 10.1063/1.108400

DO - 10.1063/1.108400

M3 - Article

AN - SCOPUS:0000907665

SN - 0003-6951

VL - 61

SP - 1877

EP - 1879

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 16

ER -

Hard x-ray phase zone plate fabricated by lithographic techniques

Abstract

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