Global dynamics of MEMS resonators under superharmonic excitation

Mohammad I. Younis; Eihab M. Abdel-Rahman; Ali H. Nayfeh

Global dynamics of MEMS resonators under superharmonic excitation

Mohammad I. Younis^*, Eihab M. Abdel-Rahman, Ali H. Nayfeh

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

6 Scopus citations

Abstract

We present a methodology to simulate the transient and steady-state dynamics of microbeams undergoing small or large motions actuated by combined DC and AC loads. We use our methodology to simulate the dynamics of MEMS resonators excited near half their fundamental natural frequencies (superharmonic excitation). We present results showing the effect of varying the DC bias, the damping, and the AC excitation amplitude on the frequency-response curves. We show that the dynamic pull-in phenomenon can occur for a superharmonic excitation at an electric load much lower than that predicted based on static analysis.

Original language	English (US)
Title of host publication	Proceedings - 2004 International Conference on MEMS, NANO and Smart Systems, ICMENS 2004
Editors	W. Badawy, W. Moussa
Pages	694-699
Number of pages	6
State	Published - 2004
Externally published	Yes
Event	Proceedings - 2004 International Conference on MEMS, NANO and Smart Systems, ICMENS 2004 - Banff, Alta., Canada Duration: Aug 25 2004 → Aug 27 2004

Other

Other	Proceedings - 2004 International Conference on MEMS, NANO and Smart Systems, ICMENS 2004
Country/Territory	Canada
City	Banff, Alta.
Period	08/25/04 → 08/27/04

ASJC Scopus subject areas

Engineering(all)

Cite this

@inproceedings{427e4adb8e8d48b882c668ee2a6d490e,

title = "Global dynamics of MEMS resonators under superharmonic excitation",

abstract = "We present a methodology to simulate the transient and steady-state dynamics of microbeams undergoing small or large motions actuated by combined DC and AC loads. We use our methodology to simulate the dynamics of MEMS resonators excited near half their fundamental natural frequencies (superharmonic excitation). We present results showing the effect of varying the DC bias, the damping, and the AC excitation amplitude on the frequency-response curves. We show that the dynamic pull-in phenomenon can occur for a superharmonic excitation at an electric load much lower than that predicted based on static analysis.",

author = "Younis, {Mohammad I.} and Abdel-Rahman, {Eihab M.} and Nayfeh, {Ali H.}",

year = "2004",

language = "English (US)",

isbn = "0769521894",

pages = "694--699",

editor = "W. Badawy and W. Moussa",

booktitle = "Proceedings - 2004 International Conference on MEMS, NANO and Smart Systems, ICMENS 2004",

note = "Proceedings - 2004 International Conference on MEMS, NANO and Smart Systems, ICMENS 2004 ; Conference date: 25-08-2004 Through 27-08-2004",

}

TY - GEN

T1 - Global dynamics of MEMS resonators under superharmonic excitation

AU - Younis, Mohammad I.

AU - Abdel-Rahman, Eihab M.

AU - Nayfeh, Ali H.

PY - 2004

Y1 - 2004

N2 - We present a methodology to simulate the transient and steady-state dynamics of microbeams undergoing small or large motions actuated by combined DC and AC loads. We use our methodology to simulate the dynamics of MEMS resonators excited near half their fundamental natural frequencies (superharmonic excitation). We present results showing the effect of varying the DC bias, the damping, and the AC excitation amplitude on the frequency-response curves. We show that the dynamic pull-in phenomenon can occur for a superharmonic excitation at an electric load much lower than that predicted based on static analysis.

AB - We present a methodology to simulate the transient and steady-state dynamics of microbeams undergoing small or large motions actuated by combined DC and AC loads. We use our methodology to simulate the dynamics of MEMS resonators excited near half their fundamental natural frequencies (superharmonic excitation). We present results showing the effect of varying the DC bias, the damping, and the AC excitation amplitude on the frequency-response curves. We show that the dynamic pull-in phenomenon can occur for a superharmonic excitation at an electric load much lower than that predicted based on static analysis.

UR - http://www.scopus.com/inward/record.url?scp=16244407416&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:16244407416

SN - 0769521894

SP - 694

EP - 699

BT - Proceedings - 2004 International Conference on MEMS, NANO and Smart Systems, ICMENS 2004

A2 - Badawy, W.

A2 - Moussa, W.

T2 - Proceedings - 2004 International Conference on MEMS, NANO and Smart Systems, ICMENS 2004

Y2 - 25 August 2004 through 27 August 2004

ER -

Global dynamics of MEMS resonators under superharmonic excitation

Abstract

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ASJC Scopus subject areas

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