Gate-first integration of tunable work function metal gates of different thicknesses into high-k metal gates CMOS FinFETs for multi- VTh engineering

Muhammad Mustafa Hussain, Casey Eben Smith, Harlan Rusty Harris, Chadwin Young, Hsinghuang Tseng, Rajarao Jammy

Research output: Contribution to journal › Article › peer-review

26 Scopus citations

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Engineering