We demonstrated microcavity-assisted crack propagation for the full-scale exfoliation of a InGaN-based light-emitting diode (LED) membrane by using nanoporous structures and tensile-stressed Ni layers. The blue LED membrane was transferred on a glass slide by using an adhesive bonding and showed good performance.
|Original language||English (US)|
|Title of host publication||2022 28th International Semiconductor Laser Conference, ISLC 2022|
|Publisher||Institute of Electrical and Electronics Engineers Inc.|
|State||Published - 2022|
|Event||28th International Semiconductor Laser Conference, ISLC 2022 - Matsue, Japan|
Duration: Oct 16 2022 → Oct 19 2022
|Name||Conference Digest - IEEE International Semiconductor Laser Conference|
|Conference||28th International Semiconductor Laser Conference, ISLC 2022|
|Period||10/16/22 → 10/19/22|
Bibliographical notePublisher Copyright:
© 2022 IEICE.
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering