TY - PAT
T1 - Fractal Structures For Mems Variable Capacitors
AU - Elshurafa, Amro M.
AU - Radwan, Ahmed G.
AU - Emira, Ahmed
AU - Salama, Khaled N.
N1 - KAUST Repository Item: Exported on 2019-02-13
PY - 2014/8/28
Y1 - 2014/8/28
N2 - In accordance with the present disclosure, one embodiment of a fractal variable capacitor comprises a capacitor body in a microelectromechanical system (MEMS) structure, wherein the capacitor body has an upper first metal plate with a fractal shape separated by a vertical distance from a lower first metal plate with a complementary fractal shape; and a substrate above which the capacitor body is suspended.
AB - In accordance with the present disclosure, one embodiment of a fractal variable capacitor comprises a capacitor body in a microelectromechanical system (MEMS) structure, wherein the capacitor body has an upper first metal plate with a fractal shape separated by a vertical distance from a lower first metal plate with a complementary fractal shape; and a substrate above which the capacitor body is suspended.
UR - http://hdl.handle.net/10754/595050
UR - http://appft.uspto.gov/netacgi/nph-Parser?Sect1=PTO1&Sect2=HITOFF&d=PG01&p=1&u=%2Fnetahtml%2FPTO%2Fsrchnum.html&r=1&f=G&l=50&s1=%2220140240894%22.PGNR.&OS=DN/20140240894&RS=DN/20140240894
UR - http://assignment.uspto.gov/#/search?adv=publNum:20140240894
UR - http://www.google.com/patents/US20140240894
UR - http://worldwide.espacenet.com/publicationDetails/biblio?CC=US&NR=2014240894A1&KC=A1&FT=D
M3 - Patent
M1 - US9614024B2
ER -