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Formation of polymers in TMGa/NH
3
/H
2
system under GaN growth
Akira Hirako
*
,
Kazuhiro Ohkawa
*
Corresponding author for this work
Computer, Electrical and Mathematical Sciences and Engineering
Research output
:
Contribution to journal
›
Article
›
peer-review
10
Scopus citations
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3
/H
2
system under GaN growth'. Together they form a unique fingerprint.
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Chemistry
Polymer
100%
Reaction Temperature
50%
Dissociation
25%
Polymerization Reaction
25%
Radiative Heat Transfer
25%
Analytical Method
25%
Simulation
25%
Chemistry
25%
Chemical Reaction
25%
Ammonia
25%
Reactor
25%
Physics
Computational Fluid Dynamics
75%
Model
50%
Temperature
50%
Vapor Phase
25%
Dissociation
25%
Polymerisation
25%
Metalorganic Vapor Phase Epitaxy
25%
Radiative Heat Transfer
25%
Region
25%
Simulation
25%
Growth
25%
Biochemistry, Genetics and Molecular Biology
H2 System
50%
Temperature
50%
Vapor
25%
Dissociation
25%
Polymerization
25%
Gas
25%
Heat Transfer
25%
Growth
25%
Liquid
25%
Dynamics
25%
Chemical Engineering
Polymer
100%
Temperature
50%
Metallorganic Chemical Vapor Deposition
50%
Material Science
Polymer
100%
Polymerization
25%
Film
25%